Directional microphone and associated packing techniques
First Claim
1. A device, comprising:
- an acoustic sensor havinga sensing diaphragm configured to sense sound pressure,a cavity below the sensing diaphragm, anda first substrate;
a channel with an inlet open at an edge of the first substrate and an outlet connected with the cavity; and
a housing enclosing the acoustic sensor, the housing having a cover attached to a second substrate supporting the first substrate, whereinthe cover includes a first opening over the sensing diaphragm, and a second opening at a side of the cover, the second opening being disposed adjacent to the inlet of the channel, andthe second substrate further includes a barrier wall disposed outside the housing at an edge of the second substrate and adjacent to the second opening, the barrier wall being spaced apart from the housing.
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Accused Products
Abstract
Aspects of the disclosure provide a packaging technique for making a directional microphone which employs mechanical structures to cancel undesired background noise to realize the directional function instead of an extra sensor required in electronic noise-cancelling techniques, thus reducing footprint and cost of a directional microphone. A directional microphone based on this technique can include an acoustic sensor and a housing enclosing the acoustic sensor. The acoustic sensor can include a sensing diaphragm, a cavity below the sensing diaphragm, and a first substrate. The directional microphone device can further includes a channel with an inlet open at an edge of the first substrate and an outlet connected with the cavity. The housing can include a cover attached to a second substrate supporting the first substrate. The cover can include a first opening over the sensing diaphragm and a second opening at a side of the cover.
10 Citations
19 Claims
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1. A device, comprising:
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an acoustic sensor having a sensing diaphragm configured to sense sound pressure, a cavity below the sensing diaphragm, and a first substrate; a channel with an inlet open at an edge of the first substrate and an outlet connected with the cavity; and a housing enclosing the acoustic sensor, the housing having a cover attached to a second substrate supporting the first substrate, wherein the cover includes a first opening over the sensing diaphragm, and a second opening at a side of the cover, the second opening being disposed adjacent to the inlet of the channel, and the second substrate further includes a barrier wall disposed outside the housing at an edge of the second substrate and adjacent to the second opening, the barrier wall being spaced apart from the housing. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A device, comprising:
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an acoustic sensor having a sensing diaphragm configured to sense sound pressure, a cavity below the sensing diaphragm, and a first substrate; a channel with an inlet open at an edge of the first substrate and an outlet connected with the cavity; a housing enclosing the acoustic sensor, the housing having a cover attached to a second substrate supporting the first substrate; and multiple channels each having an inlet open at the edge of the first substrate and an outlet connected with the cavity, wherein the cover includes a first opening over the sensing diaphragm, and a second opening at a side of the cover, the second opening being disposed adjacent to the inlet of the channel, the cover includes multiple second openings at sides of the cover, and each of the multiple second openings is positioned adjacent to respective inlets of the multiple channels.
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19. A device of, comprising:
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an acoustic sensor having a sensing diaphragm configured to sense sound pressure, a cavity below the sensing diaphragm, and a first substrate; a channel with an inlet open at an edge of the first substrate and an outlet connected with the cavity; a housing enclosing the acoustic sensor, the housing having a cover attached to a second substrate supporting the first substrate; and an anechoic chip disposed over the cover and configured to absorb sound waves, wherein the cover includes a first opening over the sensing diaphragm, and a second opening at a side of the cover, the second opening being disposed adjacent to the inlet of the channel.
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Specification