Method and apparatus for electrostatic mode-alignment on planar MEMS gyroscopes
First Claim
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1. An apparatus comprising:
- a resonant body having a first height dimension value h1 and an exterior perimeter surface; and
a plurality of electrodes disposed adjacent the exterior perimeter surface of the resonant body,wherein at least one of the plurality of electrodes is an alignment electrode and has a second height dimension value h2 that is less than the first height dimension value h1 of the resonant body,wherein the first height dimension value h1 and the second height dimension value h2 correspond to heights of top surfaces of the respective structures from a reference base.
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Abstract
A MEMS BAW vibratory planar gyroscope having an in-plane electrode configuration for mode-alignment by utilizing alignment electrodes that have a height less than a full height of the gyroscope resonant body. Such alignment electrodes apply a force component that affects modes with both in-plane and out-of-plane movements. The gyroscope includes a resonant body having a height and a perimeter surface and electrodes disposed adjacent the exterior perimeter surface of the resonant body. At least one of the electrodes is an alignment electrode and has a height less than the height of the resonant body.
12 Citations
25 Claims
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1. An apparatus comprising:
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a resonant body having a first height dimension value h1 and an exterior perimeter surface; and a plurality of electrodes disposed adjacent the exterior perimeter surface of the resonant body, wherein at least one of the plurality of electrodes is an alignment electrode and has a second height dimension value h2 that is less than the first height dimension value h1 of the resonant body, wherein the first height dimension value h1 and the second height dimension value h2 correspond to heights of top surfaces of the respective structures from a reference base. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An apparatus comprising:
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a resonant body defined by a first height dimension value h1 and an exterior perimeter, the resonant body having a vibratory mode characterized by a plurality of in-plane mode anti-node locations and a plurality of out-of-plane mode anti-node locations on the resonant body; and at least one electrode disposed at a location about the exterior perimeter of the resonant body where an in-plane mode antinode location and an out-of-plane mode anti-node location coincide, wherein the at least one electrode is an alignment electrode. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A method of making a MEMS apparatus, comprising:
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A) forming a resonant body having a first height dimension value h1 and an exterior perimeter surface; and B) disposing at least one electrode adjacent the exterior perimeter surface of the resonant body, wherein the at least one of the electrodes is an alignment electrode and has a second height dimension value h2 that is less than the first height dimension value h1 of the resonant body, wherein the first height dimension value h1 and the second height dimension value h2 correspond to heights of top surfaces of the respective structures from a reference base. - View Dependent Claims (16, 17, 18, 19)
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20. A gyroscope, comprising:
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a resonant body having a first height dimension value h1 and an exterior perimeter surface, the resonant body having a vibratory mode characterized by a plurality of in-plane mode anti-node locations and a plurality of out-of-plane mode anti-node locations on the resonant body; an opening defined in the resonant body; a first plurality of side electrodes disposed adjacent the resonant body, each side electrode having a same height as the first height dimension value h1; at least one alignment electrode disposed adjacent the resonant body at a location where an in-plane mode antinode location and an out-of-plane mode antinode location coincide, wherein the at least one alignment electrode has a second height dimension value h2 that is less than the first height dimension value h1. - View Dependent Claims (21, 22, 23, 24, 25)
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Specification