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Pressure sensor and microphone

  • US 10,082,430 B2
  • Filed: 08/08/2017
  • Issued: 09/25/2018
  • Est. Priority Date: 03/29/2012
  • Status: Active Grant
First Claim
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1. A pressure sensor comprising:

  • a base;

    a first sensor unit provided on the base;

    a second sensor unit provided at a location on the base different from a location of the first sensor unit;

    the first sensor unit including;

    a first transducer thin film having a first membrane surface, the first transducer thin film being flexible;

    a first strain sensing device provided at a location on the first membrane surface different from a location of a barycenter of the first membrane surface, the first strain sensing device including a first magnetic layer, a second magnetic layer, and a first intermediate layer provided between the first magnetic layer and the second magnetic layer,the second sensor unit including;

    a second transducer thin film having a second membrane surface, the second transducer thin film being flexible; and

    a third strain sensing device provided on the second membrane surface, the third strain sensing device including a fifth magnetic layer, a sixth magnetic layer, and a third intermediate layer provided between the fifth magnetic layer and the sixth magnetic layer, the third intermediate layer being nonmagnetic,a width of the second transducer thin film passing through a barycenter of the second membrane surface of the second transducer thin film along a direction parallel with the second membrane surface being different from a width of the first transducer thin film passing through the barycenter of the first membrane surface of the first transducer thin film along a direction parallel with the first membrane surface.

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