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Pressure sensor

  • US 10,082,435 B2
  • Filed: 06/17/2015
  • Issued: 09/25/2018
  • Est. Priority Date: 07/02/2014
  • Status: Expired due to Fees
First Claim
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1. A pressure sensor, comprising:

  • a support member including silicon;

    a membrane supported by the support member, the membrane being flexible, the membrane including a first portion and a second portion, the first portion overlapping the support member in a first direction, the second portion not overlapping the support member in the first direction, the second portion including a central part and an edge part located around the central part, a first thickness of the central part along the first direction being thinner than a second thickness of the edge part in the first direction; and

    a strain detection element provided on the membrane at the edge part, the strain detection element includinga first magnetic layer,a second magnetic layer apart from the first magnetic layer in the first direction, andan intermediate layer provided between the first magnetic layer and the second magnetic layer,an electrical resistance of the strain detection element being configured to change depending on a strain of the membrane, wherein the strain detection element operates based on the magnetoresistive effect.

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