Multi-sensor system and method of forming same

• US 10,082,438 B2
• Filed: 04/30/2015
• Issued: 09/25/2018
• Est. Priority Date: 04/30/2015
• Status: Active Grant

• Current Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Original Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Inventors: Zhang, Qing
• Primary Examiner(s): BOLDUC, DAVID J
• Application Number:
  US14/700,424
• Publication Number:
  US 20160320258A1
• Time in Patent Office: 1,244 Days
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2201/0242 Gyroscopes
• CPC Class Codes: B81B 2201/0264 Pressure sensors
• CPC Class Codes: B81B 7/02 containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] B81B7/04 takes precedence
• CPC Class Codes: B81C 1/00015 for manufacturing microsystems
• CPC Class Codes: G01L 19/0092 Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature G01L9/025, G01L9/045, G01L9/065, G01L9/085, G01L9/105, G01L9/125, G01L19/02, G01L19/04 take precedence; measuring two or more variable G01D21/02; temperature sensors with pressure compensation G01K1/26
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up

Abstract

A method for forming a multi-sensor system includes forming an inertial sensor fixed electrode of an inertial sensor and a movable electrode of a pressure sensor on a first substrate having through silicon vias (TSVs). A second substrate is fusion bonded to a bonding layer on the first substrate. The second substrate and the bonding layer are patterned to form a transducer layer of the inertial sensor and a pressure sensor fixed electrode of the pressure sensor. The first substrate is etched to form a pressure sensor port aligned with the movable electrode.

Claims

1. A multi-sensor system comprising:

a first substrate;

an insulating layer on the first substrate;

a pressure sensor comprising;

a movable electrode aligned with a pressure sensor port, the movable electrode being on the insulating layer, the pressure sensor port being within the first substrate, wherein the pressure sensor port extends partially through the first substrate, a pressure sensing diaphragm portion of the first substrate and a pressure sensor diaphragm portion of the insulating layer being between the pressure sensor port and the movable electrode; and

a pressure sensor fixed electrode comprising a first portion of a second substrate; and

an inertial sensor comprising;

an inertial sensor fixed electrode on the insulating layer; and

a transducer layer comprising a second portion of the second substrate.

2. The multi-sensor system of claim 1 further comprising:

vias within the first substrate, the vias being configured to provide input/output signals to the pressure sensor and the inertial sensor.

3. The multi-sensor system of claim 1 further comprising:

a third substrate sealing the inertial sensor and providing a hermetic reference cavity for the pressure sensor.

4. The multi-sensor system of claim 3 wherein the third substrate comprises a transducer layer cavity aligned with the transducer layer.

5. The multi-sensor system of claim 3 further comprising connecting structures comprising posts, the third substrate being mounted to the posts.

6. The multi-sensor system of claim 5 further comprising:

a contact layer on the posts; and

contact pads on the third substrate, the contact layer being bonded to the contact pads to thereby mount the third substrate to the posts.

7. The multi-sensor system of claim 1 further comprising a plurality of pressure sensors comprising the pressure sensor, the pressure sensors configured to measure different pressures.