Directional pulse injection into a microelectronic system for electrostatic test

• US 10,082,534 B2
• Filed: 06/17/2015
• Issued: 09/25/2018
• Est. Priority Date: 06/17/2015
• Status: Active Grant

• Current Assignee: Intel Corporation
• Original Assignee: Intel IP Corporation (Intel Corporation)
• Inventors: Gossner, Harald, Domanski, Krzysztof, Johnsson, David, Orr, Benjamin J.
• Primary Examiner(s): Hollington, Jermele M
• Assistant Examiner(s): CURTIS, SEAN M
• Application Number:
  US15/029,066
• Publication Number:
  US 20170168110A1
• Time in Patent Office: 1,196 Days
• Field of Search: 32476301, 324456
• CPC Class Codes: G01R 31/002 where the device under test is an electronic circuit
• CPC Class Codes: G01R 31/14 Circuits therefor , e.g. for generating test voltages, sensing circuits G01R31/1209 - G01R31/1227 take precedence; for testing switches G01R31/327
• CPC Class Codes: G01R 31/281 Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing G01R31/2818 takes precedence
• CPC Class Codes: G01R 31/2851 Testing of integrated circuits [IC] G01R31/317 takes precedence; testing individual devices G01R31/26; testing printed circuits G01R31/2801
• CPC Class Codes: G01R 31/2879 related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads

Abstract

A directional pulse injection system and method are described for injecting a pulse into a microelectronic system for electrostatic test. One example has a transformer coupled to a pulse source through a transmission line and to a conductive trace of a test board to apply the electrical pulse to the trace as a test pulse. The test board is connected to a microelectronic device under test. This example also has a cancellation pulse transmission line coupled to the pulse source and a cancellation pulse contact coupled to the pulse source through the cancellation pulse transmission line and to the trace on a side of the trace opposite the transformer to receive a cancellation signal from the pulse source and to couple the cancellation signal to the trace to cancel a portion of the test pulse.

Claims

1. An apparatus comprising:

a pulse source to produce an electrical pulse;

a test pulse transmission line coupled to the pulse source;

a transformer coupled to the pulse source through the transmission line and to a conductive trace of a test board to apply the electrical pulse to the trace as a test pulse, the test board being connected to a microelectronic device under test, wherein the trace has a contact coupled to the device under test;

a cancellation pulse transmission line coupled to the pulse source; and

a cancellation pulse contact coupled to the pulse source through the cancellation pulse transmission line and to the trace on a side of the trace opposite the transformer to receive a cancellation signal from the pulse source and to couple the cancellation signal to the trace to cancel a portion of the test pulse.

2. The apparatus of claim 1, wherein the pulse source comprises a test pulse source and a cancellation pulse source.

3. The apparatus of claim 1, wherein the cancellation pulse transmission line further comprises an inductor selected to match the inductance of the test pulse transmission line and the transformer.

4. The apparatus of claim 1, wherein the cancellation pulse transmission line further comprises a resistor selected to match the inductance of the test pulse transmission line and the transformer.

5. The apparatus of claim 1, wherein the cancellation pulse transmission line further comprises a diode to decouple the trace from the cancellation pulse transmission line.

6. The apparatus of claim 1, wherein the cancellation pulse contact is a galvanic contact.

7. The apparatus of claim 1, wherein the transformer has a secondary winding directly connected to the conductive trace of the test board.

8. The apparatus of claim 1, further comprising movable pins between the transformer and the trace to allow the transformer to removably contact the trace.

9. The apparatus of claim 1, wherein the secondary winding of the transformer consists of a portion of the trace.

10. The apparatus of claim 1, further comprising a second board electrically coupled to the test board and having a plurality of contact pads, wherein the transformer is coupled to the conductive trace through contact pads of the second board.

11. A method comprising:

producing an electrical pulse at a pulse source;

applying the electrical pulse to a conductive trace of a test board as a test pulse through a transformer coupled to the pulse source through a transmission line, the test board being connected to a microelectronic device under test, wherein the trace has a contact coupled to the device under test; and

applying a cancellation pulse from a cancellation pulse transmission line coupled to the pulse source to a cancellation pulse contact, the cancellation pulse contact being coupled to the trace on a side of the trace opposite the transformer to receive the cancellation signal from the pulse source and to couple the cancellation signal to the trace to cancel a portion of the test pulse.

12. The method of claim 11, further comprising producing the cancellation pulse at the pulse source.

13. The method of claim 11, further comprising impedance matching the test pulse transmission line using an inductor selected to match the inductance of the test pulse transmission line and the transformer.

14. The method of claim 11, wherein applying the cancellation pulse comprises applying the cancellation pulse through a galvanic contact to the trace.

15. The method of claim 11, wherein applying the test pulse comprises applying the test pulse through a secondary winding of the transformer that is directly connected to the conductive trace of the test board.

16. The method of claim 11, wherein applying the test pulse comprises applying the test pulse through a secondary winding of the transformer that is a portion of the trace.

17. An apparatus comprising:

a test board connected to a device under test having a plurality of conductive traces coupled to pins of the device under test;

a test controller coupled to the test board to drive the signals and power on the test board to simulate operation of the device under test;

a pulse source to produce an electrical pulse;

a test pulse transmission line coupled to the pulse source;

a transformer coupled to the pulse source through the transmission line and to a selected conductive trace of the plurality of the conductive traces of the test board to apply the electrical pulse to the trace as a test pulse;

a cancellation pulse transmission line coupled to the pulse source; and

a cancellation pulse contact coupled to the pulse source through the cancellation pulse transmission line and to the selected trace on a side of the selected trace opposite the transformer to receive a cancellation signal from the pulse source and to couple the cancellation signal to the trace to cancel a portion of the test pulse.

18. The apparatus of claim 17, wherein the cancellation pulse transmission line further comprises:

an inductor selected to match the inductance of the test pulse transmission line and the transformer;

a resistor selected to match the inductance of the test pulse transmission line and the transformer; and

a diode to decouple the trace from the cancellation pulse transmission line.

19. The apparatus of claim 17, wherein the transformer has a secondary winding directly connected to the conductive trace of the test board.

20. The apparatus of claim 17, further comprising a second board electrically coupled to the test board and having a plurality of contact pads, wherein the transformer is coupled to the selected conductive trace through contact pads of the second board.