Glass articles and methods for controlled bonding of glass sheets with carriers

• US 10,086,584 B2
• Filed: 10/07/2013
• Issued: 10/02/2018
• Est. Priority Date: 12/13/2012
• Status: Active Grant

• Current Assignee: Corning Incorporated
• Original Assignee: Corning Incorporated
• Inventors: Bellman, Robert Alan, Bookbinder, Dana Craig, Manley, Robert George, Mazumder, Prantik, Chang, Theresa, Domey, Jeffrey John, Enicks, Darwin Gene, Ravichandran, Vasudha, Stephens, II, Alan Thomas, Thomas, John Christopher
• Primary Examiner(s): Van Sell, Nathan L
• Application Number:
  US14/047,506
• Publication Number:
  US 20140170378A1
• Time in Patent Office: 1,821 Days
• Field of Search: 428141, 428332, 428337, 428426, 428422, 428429, 156 60
• CPC Class Codes: B32B 17/06 comprising glass as the main or only constituent of a layer, next to another layer of a specific material
• CPC Class Codes: B32B 7/06 permitting easy separation
• CPC Class Codes: B32B 7/12 using interposed adhesives or interposed materials with bonding properties
• CPC Class Codes: C03C 17/002 for flat glass, e.g. float glass
• CPC Class Codes: C03C 27/06 Joining glass to glass by processes other than fusing fusing C03B23/20; units for use as elements for closing wall or like openings and comprising two or more parallel glass panes in spaced relationship, the panes being permanently secured together E06B3/66
• CPC Class Codes: C09J 5/06 involving heating of the applied adhesive
• CPC Class Codes: Y10T 156/10 Methods of surface bonding and/or assembly therefor
• CPC Class Codes: Y10T 428/24355 Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
• CPC Class Codes: Y10T 428/26 Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
• CPC Class Codes: Y10T 428/266 of base or substrate
• CPC Class Codes: Y10T 428/31544 Addition polymer is perhalogenated
• CPC Class Codes: Y10T 428/31612 As silicone, silane or siloxane

Abstract

Surface modification layers and associated heat treatments, that may be provided on a sheet, a carrier, or both, to control both room-temperature van der Waals (and/or hydrogen) bonding and high temperature covalent bonding between the thin sheet and carrier. The room-temperature bonding is controlled so as to be sufficient to hold the thin sheet and carrier together during vacuum processing, wet processing, and/or ultrasonic cleaning processing, for example. And at the same time, the high temperature covalent bonding is controlled so as to prevent a permanent bond between the thin sheet and carrier during high temperature processing, as well as maintain a sufficient bond to prevent delamination during high temperature processing.

Claims

1. A glass article comprising:

a carrier having a carrier bonding surface;

a sheet having a sheet bonding surface;

a surface modification layer uniformly disposed on one of the carrier bonding surface and the sheet bonding surface, the surface modification layer is one of;

an aromatic silane, and

a plasma polymerized fluoropolymer, wherein the plasma polymerized fluoropolymer directly contacts one of the carrier bonding surface and the sheet bonding surface;

the carrier bonding surface being bonded with the sheet bonding surface with the surface modification layer therebetween, wherein the surface energy bonding the sheet to the carrier is of such a character that after subjecting the article to a temperature cycle by heating in a chamber cycled from room temperature to 600°

C. at a rate of 9.2°

C. per minute, held at a temperature of 600°

C. for 10 minutes, and then cooled at 1°

C. per minute to 300°

C., and then removing the article from the chamber and allowing the article to cool to room temperature, the carrier and sheet do not separate from one another if one is held and the other subjected to the force of gravity, there is no outgassing from the surface modification layer during the temperature cycle, and the sheet may be separated from the carrier without breaking the thinner one of the carrier and the sheet into two or more pieces.

2. The glass article of claim 1, wherein the heating is performed in Nitrogen.

3. The glass article of claim 1, wherein the carrier comprises glass.

4. The glass article of claim 1, wherein the carrier without any surface modification layer comprises an average surface roughness Ra of ≤

2 nm.

5. The glass article of claim 1, wherein the carrier comprises a thickness of 200 microns to 3 mm.

6. The glass article of claim 1, wherein the sheet comprises glass.

7. The glass article of claim 1, wherein the sheet without any surface modification layer comprises an average surface roughness Ra of ≤

2 nm.

8. The glass article of claim 1, wherein the sheet comprises a thickness of ≤

300 microns.

9. The glass article of claim 1, wherein the surface modification layer comprises a uniform thickness of from 0.1 to 100 nm.

10. The glass article of claim 1, wherein the surface modification layer comprises a plasma polymerized fluoropolymer, and the plasma polymerized fluoropolymer comprises one of:

plasma polymerized polytetrafluoroethylene; and

a plasma polymerized fluoropolymer surface modification layer deposited from a CF4-C4F8 mixture having ≤

40% C4F8.

11. The glass article of claim 1, wherein the surface modification layer comprises an aromatic silane, and the aromatic silane comprises one of:

phenyltriethoxysilane;

diphenyldiethoxysilane; and

4-pentafluorophenyltriethoxysilane.

12. The glass article of claim 1, wherein the surface modification layer comprises an aromatic silane, and the aromatic silane comprises chlorophenyl, or fluorophenyl, silyl groups.

13. A method of making a glass article comprising:

obtaining a carrier having a bonding surface,

obtaining a sheet having a sheet bonding surface,

depositing a surface modification layer on the carrier bonding surface, the surface modification layer is one of;

an aromatic silane, and

a plasma polymerized fluoropolymer, wherein the plasma polymerized fluoropolymer directly contacts one of the carrier bonding surface and the sheet bonding surface;

bonding the sheet to the carrier by disposing the sheet bonding surface on the carrier bonding surface with the surface modification layer therebetween,

controlling the surface energy of the carrier bonding surface and of the sheet bonding surface so that a component of the surface energy giving rise to covalent bonding between the sheet bonding surface and the carrier bonding surface is of such a character that after subjecting the bonded sheet and carrier article to a temperature cycle by heating in a chamber cycled from room temperature to 600°

C. at a rate of 9.2°

C. per minute, held at a temperature of 600°

C. for 10 minutes, and then cooled at 1°

C. per minute to 300°

C., and then removing the article from the chamber and allowing the article to cool to room temperature, the carrier and sheet do not separate from one another if one is held and the other subjected to the force of gravity, there is no outgassing from the interface between the carrier bonding surface and the sheet bonding surface during the temperature cycle, and the sheet may be separated from the carrier without breaking the thinner one of the carrier and the sheet into two or more pieces.

14. The method of claim 13, wherein the heating is performed in Nitrogen.

15. The method of claim 13, wherein the carrier comprises glass.

16. The method of claim 13, wherein the carrier without any surface modification layer comprises an average surface roughness Ra of ≤

2 nm.

17. The method of claim 13, wherein the carrier comprises a thickness of 200 microns to 3 mm.

18. The method of claim 13, wherein the sheet comprises glass.

19. The method of claim 13, wherein the sheet without any surface modification layer comprises an average surface roughness Ra of ≤

2 nm.

20. The method of claim 13, wherein the sheet comprises a thickness of ≤

300 microns.

21. The method of claim 13, wherein a surface modification layer is uniformly disposed on one of the carrier bonding surface and the sheet bonding surface and the surface modification layer comprises a uniform thickness of from 0.1 to 100 nm.

22. The method of claim 13, wherein the surface modification layer comprises a plasma polymerized fluoropolymer, and the plasma polymerized fluoropolymer comprises one of:

plasma polymerized polytetrafluroethylene; and

a plasma polymerized fluoropolymer surface modification layer deposited from a CF4-C4F8 mixture having ≤

40% C4F8.

23. The method of claim 13, wherein the surface modification layer comprises an aromatic silane, and the aromatic silane comprises one of:

phenyltriethoxysilane;

diphenyldiethoxysilane; and

4-pentafluorophenyltriethoxysilane.

24. The method of claim 13, wherein the surface modification layer comprises an aromatic silane, and the aromatic silane comprises chlorophenyl, or fluorophenyl, silyl groups.