Sensor and electronic device

• US 10,094,723 B2
• Filed: 02/23/2017
• Issued: 10/09/2018
• Est. Priority Date: 09/21/2016
• Status: Expired due to Fees

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Otsu, Kenji, Hara, Michiko, Fuji, Yoshihiko, Masunishi, Kei, Yuzawa, Akiko, Nagata, Tomohiko, Kaji, Shiori, Higashi, Yoshihiro, Okamoto, Kazuaki, Baba, Shotaro
• Primary Examiner(s): Patel, Harshad R
• Assistant Examiner(s): WILLIAMS, JAMEL E
• Application Number:
  US15/440,484
• Publication Number:
  US 20180080842A1
• Time in Patent Office: 593 Days
• Field of Search: 73774
• CPC Class Codes: G01B 7/18 using change in resistance
• CPC Class Codes: G01L 1/2287 constructional details of the strain gauges adjustable resistors H01C10/00
• CPC Class Codes: G01L 7/02 in the form of elastically-deformable gauges
• CPC Class Codes: G01L 9/0051 using variations in ohmic resistance

Abstract

A sensor includes a film portion and a first sensor portion. The film portion is deformable. The first sensor portion is provided at the film portion. The first sensor portion includes a first conductive layer, a second conductive layer, a first magnetic layer, a second magnetic layer, and a first intermediate layer. The second conductive layer is provided between the first conductive layer and the film portion. The first magnetic layer is provided between the first conductive layer and the second conductive layer. The second magnetic layer is provided between the first magnetic layer and the second conductive layer. The first intermediate layer is provided between the first magnetic layer and the second magnetic layer. A curvature of the first conductive layer is different from a curvature of at least a portion of the film portion.

Claims

1. A sensor, comprising:

a film portion, the film portion being deformable;

a support portion supporting the film portion; and

a first sensor portion provided at the film portion, the first sensor portion including

a first conductive layer,

a second conductive layer provided between the first conductive layer and the film portion,

a first magnetic layer provided between the first conductive layer and the second conductive layer,

a second magnetic layer provided between the first magnetic layer and the second conductive layer, and

a first intermediate layer provided between the first magnetic layer and the second magnetic layer,

a curvature of the first conductive layer being different from a curvature of at least a portion of the film portion,

wherein

the first conductive layer has a first conductive layer surface, and a second conductive layer surface positioned between the first conductive layer surface and the film portion, and

the first conductive layer surface including a first point, a second point, and a third point, the third point being positioned between the first point and the second point on the first conductive layer surface,

the first to third points being positioned in a plane including a first direction and a second direction, the first direction being on a shortest line connecting the support portion and the first sensor portion, the second direction being from the second magnetic layer toward the first magnetic layer,

a first straight line connecting the first point and the third point being tilted with respect to a second straight line connecting the second point and the third point.

2. The sensor according to claim 1, wherein

a magnetostriction constant of the first magnetic layer is positive,

a direction of a magnetization of the second magnetic layer is aligned with a third direction,

the third direction is perpendicular to the first direction and perpendicular to the second direction, and

a straight line connecting the first point and the second point is positioned between the third point and the film portion.

3. The sensor according to claim 1, wherein

a magnetostriction constant of the first magnetic layer is negative,

a direction of a magnetization of the second magnetic layer is aligned with the third direction,

the third direction is perpendicular to the first direction and perpendicular to the second direction, and

the third point is positioned between the film portion and a straight line connecting the first point and the second point.

4. The sensor according to claim 1, wherein

a magnetostriction constant of the first magnetic layer is negative,

a direction of a magnetization of the second magnetic layer is aligned with the first direction, and

a straight line connecting the first point and the second point is positioned between the third point and the film portion.

5. The sensor according to claim 1, wherein the at least a portion of the film portion includes a center of the film portion.

6. The sensor according to claim 1, further comprising:

a printed circuit board; and

a cover,

the first sensor portion and the film portion being disposed between the printed circuit board and the cover.

11. An electronic device, comprising:

the sensor according to claim 1; and

a housing.

7. A sensor, comprising:

a film portion, the film portion being deformable; and

a first sensor portion provided at the film portion, the first sensor portion including

a first magnetic layer,

a second magnetic layer provided between the first magnetic layer and the film portion, and

a first intermediate layer provided between the first magnetic layer and the second magnetic layer,

a curvature of the first magnetic layer being different from a curvature of at least a portion of the film portion,

wherein

the film portion is positioned between a first space and a second space, and

the first magnetic layer is curved in a first state in which an air pressure of the first space is substantially the same as an air pressure of the second space.

8. The sensor according to claim 7, wherein the curvature of the first magnetic layer is higher than the curvature of the at least a portion of the film portion.

9. A sensor, comprising:

a film portion, the film portion being deformable;

an insulating film; and

a first sensor portion provided at the film portion, the first sensor portion including

a first magnetic layer provided between the insulating film and the film portion,

a second magnetic layer provided between the first magnetic layer and the film portion, and

a first intermediate layer provided between the first magnetic layer and the second magnetic layer,

a curvature of the insulating film being different from a curvature of at least a portion of the film portion,

wherein

the film portion is positioned between a first space and a second space, and

the insulating film is curved in a first state in which an air pressure of the first space is substantially the same as an air pressure of the second space.

10. The sensor according to claim 9, wherein

the curvature of the insulating film is higher than the curvature of the at least a portion of the film portion.