Multi-surface specular reflection inspector

• US 10,094,787 B2
• Filed: 05/19/2016
• Issued: 10/09/2018
• Est. Priority Date: 05/19/2016
• Status: Active Grant

• Current Assignee: KLA-Tencor Corporation (KLA Corporation)
• Original Assignee: KLA-Tencor Corporation (KLA Corporation)
• Inventors: Meeks, Steven W., Kudinar, Rusmin, Soetarman, Ronny, Nguyen, Hung P.
• Primary Examiner(s): Ton, Tri T
• Application Number:
  US15/159,626
• Publication Number:
  US 20170336331A1
• Time in Patent Office: 873 Days
• Field of Search: 3562371-2376, 3562391-2398, 356445-448, 356600-613, 356128-137
• CPC Class Codes: G01N 21/21 Polarisation-affecting properties G01N21/19 takes precedence
• CPC Class Codes: G01N 21/55 Specular reflectivity
• CPC Class Codes: G01N 21/958 Inspecting transparent materials or objects, e.g. windscreens for conveyed flat sheet or rod G01N21/896
• CPC Class Codes: G01N 2201/0636 Reflectors
• CPC Class Codes: G01N 2201/0638 Refractive parts
• CPC Class Codes: G01N 2201/0683 Brewster plate; polarisation controlling elements
• CPC Class Codes: G01N 2201/105 Purely optical scan

Abstract

An optical inspector includes a time varying beam reflector, a radiating source that irradiates the time varying beam reflector, a telecentric scan lens configured to direct the radiation reflected by the time varying beam reflector onto a first surface of a transparent sample, a first detector that receives at least a portion of top surface specular reflection, a second detector that receives at least a portion of the bottom surface specular reflection. A turning mirror may also be included. The turning mirror is a switchable mirror that can be adjusted to a first position where the turning mirror reflects the top and bottom surface specular reflection, and can be adjusted to a second position where the turning mirror does not reflect the top or the bottom surface specular reflection. A first and second polarizing element may also be included to detect additional types of defects on either surface.

Claims

1. An optical inspector, comprising:

a time varying beam reflector;

a radiating source that irradiates the time varying beam reflector;

a telecentric scan lens configured to direct the radiation reflected by the time varying beam reflector onto a first surface of a transparent sample, wherein a portion of the radiation irradiates a second surface of the transparent sample;

a first detector configured to receive at least a portion of top surface specular reflection and generate a first detector output signal, wherein the top surface specular reflection results from the irradiation of the first surface of the transparent sample;

a second detector configured to receive at least a portion of the bottom surface specular reflection and generate a second detector output signal, wherein the bottom surface specular reflection results from the irradiation of the second surface of the transparent sample; and

a processor that determines that a defect is present on the top surface or the bottom surface of the transparent sample using only two detector output signals;

(i) the first detector output signal, and (ii) the second detector output signal.

2. The optical inspector of claim 1, further comprising a focusing lens configured to receive the top surface specular reflection and the bottom surface specular reflection.

3. The optical inspector of claim 2, further comprising a separation mirror configured to reflect specular reflection from one the top or bottom surfaces.

4. The optical inspector of claim 2, further comprising a turning mirror configured to direct both the top surface specular reflection and the bottom surface specular reflection toward the focusing lens.

5. The optical inspector of claim 4, wherein the turning mirror is a switchable mirror that can be (i) adjusted to a first position where the turning mirror reflects the top surface specular reflection and the bottom surface specular reflection, and (ii) can be adjusted to a second position where the turning mirror does not reflect the top surface specular reflection or the bottom surface specular reflection.

6. The optical inspector of claim 2, wherein the focusing lens is an achromatic lens.

7. The optical inspector of claim 1, wherein the first and second detectors are bi-cell detectors, and wherein the optical inspector only measures specular reflections.

8. The optical inspector of claim 1, further comprising:

a first polarizing element configured to receive the top surface specular reflection, wherein the first detector is configured to receive at least a portion of polarized top surface specular reflection that passes through the first polarizing element; and

a second polarizing element configured to receive the bottom surface specular reflection, wherein the second detector receives at least a portion of polarized bottom surface specular reflection that passes through the second polarizing element.

9. The optical inspector of claim 1, wherein the first detector is rotatable about the optical axis of the top surface specular reflection.

10. The optical inspector of claim 1, wherein the second detector is rotatable about the optical axis of the bottom surface specular reflection.

11. The optical inspector of claim 1, further comprising an outgoing waveplate positioned along the source radiation path between the radiating source and the time varying beam reflector.

12. The optical inspector of claim 1, wherein the radiating source irradiates the time varying beam reflector at a first position with source radiation, wherein the telecentric scan lens is configured to direct the reflected radiation from the transparent sample to the time varying beam reflector at a second position symmetrically opposite the first position about a central axis of the telecentric scan lens.

13. The optical inspector of claim 1, further comprising:

a memory, wherein the processor receives information from the first and second detectors and stores the information or associated data in the memory.

14. The optical inspector of claim 8, wherein the time varying beam reflector is a rotating polygon, wherein the radiating source is a laser, wherein the second polarizing element is rotatable about the optical axis of the bottom surface specular reflection, and wherein the second detector is rotatable about the optical axis of the bottom surface specular reflection.

15. The optical inspector of claim 2, wherein the optical path length between the focusing lens and the first detector is approximately one-thousand, five-hundred millimeters.

16. The optical inspector of claim 1, further comprising a turning mirror configured to redirect one of the top surface specular reflection or the bottom surface specular reflection to the separation mirror.

17. An optical inspector, comprising

a time varying beam reflector;

a radiating source that irradiates the time varying beam reflector;

a lens configured to direct the radiation reflected by the time varying beam reflector onto a first surface of a transparent sample, wherein a portion of the radiation irradiates a second surface of the transparent sample;

a first means for separating top surface specular reflection from bottom surface specular reflection, wherein the top surface specular reflection results from the irradiation of the first surface of the transparent sample, and wherein the bottom surface specular reflection results from the irradiation of the second surface of the transparent sample;

a second means for measuring an intensity of the top specular reflection and an intensity of the bottom specular reflection; and

a processor that determines on which surface a defect is present, wherein the determining only uses two intensity measurements;

(i) the measured intensity of the top specular reflection, and (ii) the measured intensity of the bottom specular reflection.

18. The optical inspector of claim 17, wherein the first means is a separation mirror that is configured to only reflect specular reflection from one surface of the transparent sample.

19. The optical inspector of claim 18, wherein the second means includes a first detector, and a second detector, wherein the first detector measures the intensity of the top surface specular reflection, and wherein the second detector measures the intensity of the bottom surface specular reflection.

20. The optical inspector of claim 19, wherein the processor receives information from the first detector and second detector, and a memory that stores information output by the first detector and second detector, and wherein the optical inspector does not measure scattered radiation.