Methods of forming nanotube films and articles

• US 10,096,363 B2
• Filed: 01/25/2016
• Issued: 10/09/2018
• Est. Priority Date: 07/25/2001
• Status: Expired due to Fees

• Current Assignee: Nantero Incorporated
• Original Assignee: Nantero Incorporated
• Inventors: Rueckes, Thomas, Segal, Brent M.
• Primary Examiner(s): Yuan, Dah Wei D
• Assistant Examiner(s): Hernandez-Diaz, Jose
• Application Number:
  US15/005,091
• Publication Number:
  US 20160232972A1
• Time in Patent Office: 988 Days
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: C01B 2202/02 Single-walled nanotubes
• CPC Class Codes: C01B 2202/22 Electronic properties
• CPC Class Codes: C01B 32/162 characterised by catalysts
• CPC Class Codes: D01F 9/127 by thermal decomposition of hydrocarbon gases or vapours or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols
• CPC Class Codes: D04H 1/4234 Metal fibres
• CPC Class Codes: D04H 1/4242 Carbon fibres
• CPC Class Codes: D04H 1/43838 Ultrafine fibres, e.g. microfibres
• CPC Class Codes: G11C 13/025 using fullerenes, e.g. C60, or nanotubes, e.g. carbon or silicon nanotubes
• CPC Class Codes: G11C 2213/16 Memory cell being a nanotube, e.g. suspended nanotube
• CPC Class Codes: G11C 2213/77 Array wherein the memory element being directly connected to the bit lines and word lines without any access device being used
• CPC Class Codes: G11C 2213/81 Array wherein the array conductors, e.g. word lines, bit lines, are made of nanowires
• CPC Class Codes: G11C 23/00 Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
• CPC Class Codes: H01L 21/76838 characterised by the formation and the after-treatment of the conductors etching for patterning the conductors H01L21/3213
• CPC Class Codes: H01L 21/76885 By forming conductive members before deposition of protective insulating material, e.g. pillars, studs
• CPC Class Codes: H01L 2221/1094 Conducting structures comprising nanotubes or nanowires
• CPC Class Codes: H01L 23/53276 containing carbon, e.g. fullerenes superconducting fullerenes H10N60/853
• CPC Class Codes: H01L 27/10 including a plurality of individual components in a repetitive configuration
• CPC Class Codes: H01L 27/1203 : the substrate comprising an insulating body on a semiconductor body, e.g. SOI three-dimensional layout H01L27/0688
• CPC Class Codes: H10K 30/671 : Organic radiation-sensitive molecular electronic devices
• CPC Class Codes: H10K 71/12 : using liquid deposition, e.g. spin coating
• CPC Class Codes: H10K 71/231 : by etching of existing layers
• CPC Class Codes: H10K 85/221 : Carbon nanotubes
• CPC Class Codes: Y10S 977/742 : Carbon nanotubes, CNTs
• CPC Class Codes: Y10S 977/75 : Single-walled
• CPC Class Codes: Y10S 977/778 : within specified host or matrix material, e.g. nanocomposite films
• CPC Class Codes: Y10S 977/943 : Information storage or retrieval using nanostructure
• CPC Class Codes: Y10T 428/24802 : Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
• CPC Class Codes: Y10T 428/2918 : including free carbon or carbide or therewith [not as steel]
• CPC Class Codes: Y10T 428/2982 : Particulate matter [e.g., sphere, flake, etc.]
• CPC Class Codes: Y10T 428/30 : Self-sustaining carbon mass or layer with impregnant or other layer

Abstract

Nanotube films and articles and methods of making the same are disclosed. A conductive article or a substrate comprises at least two unaligned nanotubes extending substantially parallel to the substrate and each contacting end points of the article but each unaligned relative to the other, the nanotubes providing a conductive pathway within a predefined space.

Claims

1. A method of forming a lithographically-dimensioned conductive article of nanotubes, the method comprising:

depositing a fabric of pre-grown, functionalized nanotubes on a substrate having at least a first conductive pad and a second conductive pad;

depositing a photoresist layer on the fabric;

patterning the photoresist layer to form a patterned photoresist layer;

using a lithographic pattern transferred to the patterned photoresist layer to remove a portion of the fabric to form a patterned nanotube fabric extending substantially parallel to the substrate,

wherein each nanotube in the patterned nanotube fabric is in fixed contact with the first conductive pad and each nanotube is in fixed contact with the second conductive pad but each nanotube has an independent orientation relative to the other nanotubes,

wherein the nanotubes form a conductive article substantially parallel to the substrate between the first and second conductive pads, and

wherein the conductive article has at least two sides that are substantially parallel to each other.

2. The method of claim 1 wherein the nanotubes include single-walled nanotubes.

3. The method of claim 1 wherein the nanotubes include multi-walled nanotubes.

4. The method of claim 1 wherein the nanotubes have different lengths.

5. The method of claim 1 wherein the nanotubes are of a controllable density.

6. The method of claim 1, wherein the patterned nanotube fabric spatially extends to edges of a defined region having selected and controlled dimensions corresponding to the lithographic pattern.

7. The method of claim 1 wherein the patterned nanotube fabric is a multilayer nanotube fabric.