×

Pump having freely movable member

  • US 10,100,822 B2
  • Filed: 04/20/2015
  • Issued: 10/16/2018
  • Est. Priority Date: 04/20/2015
  • Status: Active Grant
First Claim
Patent Images

1. A method of making a micropump, comprising:

  • forming, at an upper portion of a base structure, a main chamber and a pair of valve chambers on opposite ends of the main chamber, including forming a separable structure within each valve chamber; and

    removing at least a portion of a sacrificial element underneath the separable structure to thereby separate a bottom portion of each respective separable structure from a portion of each respective valve chamber to free the respective separable structure for movement within and relative to each respective valve chamber.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×