Pump having freely movable member
First Claim
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1. A method of making a micropump, comprising:
- forming, at an upper portion of a base structure, a main chamber and a pair of valve chambers on opposite ends of the main chamber, including forming a separable structure within each valve chamber; and
removing at least a portion of a sacrificial element underneath the separable structure to thereby separate a bottom portion of each respective separable structure from a portion of each respective valve chamber to free the respective separable structure for movement within and relative to each respective valve chamber.
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Abstract
A pump includes a main chamber and a pair of valves on opposite ends of the main chamber. The respective valves each contain a freely movable member to selectively open and close each respective valve, wherein the freely movable member is formed from at least some of the same material used to form a chamber portion of the respective valves. A force applicator is coupled relative to the main chamber to alternately induce a suction action and an expulsion action.
30 Citations
15 Claims
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1. A method of making a micropump, comprising:
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forming, at an upper portion of a base structure, a main chamber and a pair of valve chambers on opposite ends of the main chamber, including forming a separable structure within each valve chamber; and removing at least a portion of a sacrificial element underneath the separable structure to thereby separate a bottom portion of each respective separable structure from a portion of each respective valve chamber to free the respective separable structure for movement within and relative to each respective valve chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A micropump comprising:
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a main chamber; a pair of valves on opposite ends of the main chamber including; an inlet valve; and an outlet valve external to the chamber, wherein the respective inlet valve and outlet valve each contain a freely movable member to selectively open and close each respective valve, wherein the freely movable member is formed from at least some of the same material used to form a chamber portion of the respective valves; and a force applicator coupled relative to the main chamber to alternately induce in the main chamber; a suction action in which the inlet valve is open and the outlet valve is closed; and an expulsion action in which the inlet valve is closed and the outlet valve is open. - View Dependent Claims (10, 11, 12, 14)
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13. A pump comprising:
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a main chamber; a pair of valves on opposite ends of the main chamber including; an inlet valve positioned within a first end of the main chamber; and an outlet valve external to the chamber, wherein the respective inlet valve and outlet valve each contain a freely movable member to selectively open and close each respective valve, and wherein the inlet valve, the outlet valve, and the main chamber extend in generally the same plane to guide fluid flow through the pump and movement of the freely movable member in the same plane; an at least partially elastic membrane defining at least one wall of the main chamber; and a force applicator coupled relative to the at least partially elastic membrane to alternately induce in the main chamber; a suction action in which the inlet valve is open and the outlet valve is closed; and an expulsion action in which the inlet valve is closed and the outlet valve is open. - View Dependent Claims (15)
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Specification