Three axis gyroscope

• US 10,101,159 B2
• Filed: 04/11/2016
• Issued: 10/16/2018
• Est. Priority Date: 04/16/2015
• Status: Active Grant

• Current Assignee: Murata Manufacturing Co Limited
• Original Assignee: Murata Manufacturing Co Limited
• Inventors: Piirainen, Tommi
• Primary Examiner(s): Huls, Natalie
• Application Number:
  US15/095,299
• Publication Number:
  US 20160305781A1
• Time in Patent Office: 918 Days
• CPC Class Codes: G01C 19/5733 Structural details or topology
• CPC Class Codes: G01C 19/5747 each sensing mass being connected to a driving mass, e.g. driving frames

Abstract

A micro-electro-mechanical device detects angular velocity, for example relating to a three axis gyroscope. The three axis gyroscope includes a two axis gyroscope structure and a one axis gyroscope structure. The gyroscope further includes a lever spring system coupling a linear drive mode oscillation of the two axis gyroscope structure and a linear drive mode oscillation of the one axis gyroscope structure into one combined primary motion. The lever spring system causes the one and two axis gyroscope structures to have equal drive mode oscillation amplitudes. A symmetrical arrangement of the lever spring system causes any reactive forces created in the lever spring system to cancel each other.

Claims

1. A three axis gyroscope, comprising:

a first gyroscope structure;

a second gyroscope structure; and

a lever spring system coupling a first linear drive mode oscillation of said first gyroscope structure and a second linear drive mode oscillation of said second gyroscope structure into one combined primary motion,

wherein one of the first and second gyroscope structures comprises a two axis gyroscope structure and another of the first and second gyroscope structures comprises a one axis gyroscope structure,

wherein said two axis gyroscope structure is configured to be driven into a first linear drive mode oscillation in the x-axis direction within a plane of the three axis gyroscope by exciting with driving actuators,

wherein a first pair of proof masses of the two axis gyroscope structure is configured to be caused a linear detection motion in the y-axis direction by angular velocity about the z-axis, and a second pair of proof masses of the two axis gyroscope structure is configured to be caused a linear detection motion in the z-axis direction by angular velocity about the y-axis,

wherein said one axis gyroscope structure is configured to be driven by coupling into a second linear drive mode oscillation in the y-axis direction within the plane of the three axis gyroscope, and

wherein a pair of proof masses of the one axis gyroscope structure is configured to be caused a linear detection motion in the z-axis direction by angular velocity about the x-axis.

2. The three axis gyroscope of claim 1,

wherein the first gyroscope structure is driven to the first linear drive mode oscillation by at least two driving actuators, and

wherein the first linear drive mode oscillation of said first gyroscope structure is coupled to the second linear drive mode oscillation of the second gyroscope structure by the lever spring system connecting said first and second gyroscope structures.

3. The three axis gyroscope of claim 1, wherein the first linear drive mode oscillation is perpendicular to the second linear drive mode oscillation.

4. The three axis gyroscope of claim 1, wherein said lever spring system comprises a symmetrical arrangement of at least two lever and spring structures configured to mutually couple drive masses of said first and second gyroscope structures, each lever and spring structure comprising:

a first lever coupled with said first gyroscope structure longitudinally aligned with the first linear drive mode oscillation of said first gyroscope structure,

a second lever coupled with said second gyroscope structure longitudinally aligned with the second linear drive mode oscillation of said second gyroscope structure, wherein the first lever and the second lever are attached to each other in a 90 degree angle at one end of the levers, and

an oblique spring attached to a point of attaching the first lever and the second lever in a 45 degree angle with respect to the first lever and the second lever.

5. The three axis gyroscope of claim 4, wherein said oblique spring is configured to cause the first lever and the second lever to move an equally long distance away from their equilibrium positions in perpendicular directions, or to cause drive masses of the first and the second gyroscope structures to have equal linear drive mode oscillation amplitudes.

6. The three axis gyroscope of claim 4,

wherein the first lever is coupled to a drive mass of said first gyroscope structure, and a longitudinal dimension of said first lever is aligned with the first linear drive mode oscillation of said first gyroscope structure, and

wherein the second lever is coupled to a drive mass of said second gyroscope structure, and a longitudinal dimension of said second lever is aligned with the second linear drive mode oscillation of said second gyroscope structure.

7. The three axis gyroscope of claim 4, wherein said lever spring system comprises an even number of said lever and spring structures arranged symmetrically on opposite sides of a symmetry axis of the gyroscope in the plane of the three axis gyroscope.

8. The three axis gyroscope of claim 1,

wherein the second gyroscope structure is disposed in an opening within a periphery of the first gyroscope structure, and

wherein the lever spring system comprises an even number of lever and spring structures arranged symmetrically on opposite sides of the second gyroscope structure, so that the opposite reactive forces caused by said lever and spring structures on the second gyroscope structure cancel each other and the parallel driving forces caused by said lever and spring structures sum with each other, causing coupling of the first linear drive mode oscillation of the first gyroscope structure into a second linear drive mode oscillation of said second gyroscope structure.

9. The three axis gyroscope of claim 1,

wherein said first gyroscope structure comprises a two axis gyroscope structure, and

wherein said second gyroscope structure comprises a one axis gyroscope structure.

10. The three axis gyroscope of claim 1,

wherein said two axis gyroscope structure comprises two pairs of proof masses, each pair configured for detecting angular velocity on a different axis of motion.

11. The three axis gyroscope of claim 10, wherein at least one pair of proof masses is mutually coupled with a lever allowing linear detection motion of the mutually coupled pair of proof masses in opposite phase and preventing linear detection motion of the mutually coupled pair of proof masses in same phase.

12. The three axis gyroscope of claim 11, wherein, in detection motion, the lever coupling the respective pair of proof masses is in rotating motion about the detection axis of the respective pair of proof masses.

13. The three axis gyroscope according to claim 1, wherein the detection motion of each proof mass of said first and second gyroscope structures comprises linear oscillation.

14. A three axis gyroscope, comprising:

a first gyroscope means for detecting first motion;

a second gyroscope means for detecting second motion; and

a lever spring means coupling a first linear drive mode oscillation of the first gyroscope means and a second linear drive mode oscillation of the second gyroscope means into one combined primary motion,

wherein one of the first and second gyroscope means detects motion in two axes, and wherein another of the first and second gyroscope means detects motion in one axis,

wherein said first gyroscope means is configured to be driven into a first linear drive mode oscillation in the x-axis direction within a plane of the three axis gyroscope by exciting with driving actuators,

wherein a first pair of proof masses of the gyroscope means for detecting motion in two axes is configured to be caused a linear detection motion in the y-axis direction by angular velocity about the z-axis, and a second pair of proof masses of the gyroscope means for detecting motion in two axes is configured to be caused a linear detection motion in the z-axis direction by angular velocity about the y-axis,

wherein said gyroscope means for detecting motion in one axis is configured to be driven by coupling into a second linear drive mode oscillation in the y-axis direction within the plane of the three axis gyroscope, and

wherein a pair of proof masses of the gyroscope means configured for detecting motion in one axis is configured to be caused a linear detection motion in the z-axis direction by angular velocity about the x-axis.

15. The three axis gyroscope of claim 14,

wherein the first gyroscope means is coupled to at least two driving actuator means, wherein the at least two driving actuator means drive the first gyroscope means to the first linear drive mode oscillation, and

wherein the first linear drive mode oscillation of the first gyroscope means is coupled to a second linear drive mode oscillation of the second gyroscope means by the lever spring means connecting the first and second gyroscope means.

16. The three axis gyroscope of claim 14, wherein the first linear drive mode oscillation is perpendicular to the second linear drive mode oscillation.

17. The three axis gyroscope of claim 14, wherein the lever spring means includes a symmetrical arrangement of at least two lever and spring structure means for mutually coupling drive masses of the first and second gyroscope means, wherein each lever and spring structure means includes:

a first lever means coupled with the first gyroscope means longitudinally aligned with the first linear drive mode oscillation of the first gyroscope means,

a second lever means coupled with the second gyroscope means longitudinally aligned with the second linear drive mode oscillation of the second gyroscope means, wherein the first lever means and the second lever means are attached to each other in a 90 degree angle at one end of each lever means, and

an oblique spring means attached to a point of attaching the first lever means and the second lever means in a 45 degree angle with respect to the first lever means and the second lever means.

18. The three axis gyroscope of claim 17, wherein the oblique spring means is for causing the first lever means and the second lever means to move an equally long distance away from their equilibrium positions in the perpendicular directions, or to cause drive masses of the first and second gyroscope means to have equal linear drive mode oscillation amplitudes.

19. The three axis gyroscope of claim 17,

wherein the first lever means is coupled to a drive mass of the first gyroscope means, and the longitudinal direction of the first lever means is aligned with the first linear drive mode oscillation of the first gyroscope means, and

wherein the second lever means is coupled to a drive mass of the second gyroscope means, and a longitudinal dimension of the second lever means is aligned with the second linear drive mode oscillation of the second gyroscope means.