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Open diaphragm harsh environment pressure sensor

  • US 10,101,234 B2
  • Filed: 02/11/2016
  • Issued: 10/16/2018
  • Est. Priority Date: 02/11/2016
  • Status: Active Grant
First Claim
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1. A pressure sensor comprising:

  • a housing;

    a diaphragm wafer comprising;

    a fluid contact surface;

    a diaphragm located along the surface and configured to deflect in response to pressure;

    a sensing element that is responsive to deflection of the diaphragm; and

    a support portion, wherein the support portion and the diaphragm define a cavity; and

    an isolator configured to absorb lateral stresses comprising;

    an opening configured to allow communication between an external fluid and the diaphragm;

    an inner portion defining the opening, the inner portion attached to the diaphragm wafer; and

    an outer portion extending laterally to and connecting to the housing, wherein the outer portion extends laterally beyond the diaphragm wafer.

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