Accelerometer
First Claim
1. A linear accelerometer comprising a support, a first mass element and a second mass element, the mass elements being rigidly interconnected to form a unitary movable proof mass, the support being located at least in part between the first and second mass elements and having groups of fixed capacitor fingers extending from opposite sides thereof, a plurality of mounting legs supporting the mass elements for movement relative to the support, at least two first groups of movable capacitor fingers provided on the first mass element and interdigitated with corresponding first groups of fixed capacitor fingers extending from the support, and at least two second groups of movable capacitor fingers provided on the second mass element and interdigitated with corresponding second groups of fixed capacitor fingers extending from the support, wherein a single, shared first electrical connection is provided to permit connection to two of the first and second groups of fixed capacitor fingers extending from the support, and wherein a single, shared second electrical connection is provided to permit connection to another two of the first and second groups of fixed capacitor fingers extending from the support, and wherein said mounting legs have roots that are close to one another to minimize stresses resulting from differential thermal expansion.
1 Assignment
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Accused Products
Abstract
An accelerometer comprises a support, a first mass element and a second mass element, the mass elements being rigidly interconnected to form a unitary movable proof mass, the support being located at least in part between the first and second mass elements, a plurality of mounting legs securing the mass elements to the support member, at least two groups of movable capacitor fingers provided on the first mass element and interdigitated with corresponding groups of fixed capacitor fingers associated with the support, and at least two groups of movable capacitor fingers provided on the second mass element and interdigitated with corresponding groups of fixed capacitor fingers associated with the support.
20 Citations
14 Claims
- 1. A linear accelerometer comprising a support, a first mass element and a second mass element, the mass elements being rigidly interconnected to form a unitary movable proof mass, the support being located at least in part between the first and second mass elements and having groups of fixed capacitor fingers extending from opposite sides thereof, a plurality of mounting legs supporting the mass elements for movement relative to the support, at least two first groups of movable capacitor fingers provided on the first mass element and interdigitated with corresponding first groups of fixed capacitor fingers extending from the support, and at least two second groups of movable capacitor fingers provided on the second mass element and interdigitated with corresponding second groups of fixed capacitor fingers extending from the support, wherein a single, shared first electrical connection is provided to permit connection to two of the first and second groups of fixed capacitor fingers extending from the support, and wherein a single, shared second electrical connection is provided to permit connection to another two of the first and second groups of fixed capacitor fingers extending from the support, and wherein said mounting legs have roots that are close to one another to minimize stresses resulting from differential thermal expansion.
Specification