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Methods for integrating a compliant material with a substrate

  • US 10,101,857 B2
  • Filed: 08/28/2015
  • Issued: 10/16/2018
  • Est. Priority Date: 08/28/2015
  • Status: Active Grant
First Claim
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1. A method for forming a sensor module, comprising:

  • providing a compliant structure that includes a compliant layer between a first protective layer and a second protective layer;

    forming a first conductive layer on the first protective layer and forming a second conductive layer on the second protective layer;

    patterning the first conductive layer to form a first conductive electrode and patterning the second conductive layer to form a second conductive electrode aligned with the first conductive electrode, the first conductive electrode and the second conductive electrode forming a capacitor;

    forming a first adhesive layer that covers the first conductive electrode and a portion of the first protective layer;

    patterning the first adhesive layer to form a first opening and a second opening in the first adhesive layer;

    forming a first substrate layer on the first adhesive layer, wherein the first substrate layer includes a first third conductive layer, and the third conductive layer electrically connects to the first conductive layer through the first opening; and

    producing a first flexible substrate tail from a portion of the first substrate layer, the first flexible substrate tail produced by removing a multi-layer portion of the compliant structure and a portion of the first conductive layer that are aligned with and to one side of the second opening.

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