GMR sensor within molded magnetic material employing non-magnetic spacer

• US 10,107,875 B2
• Filed: 11/30/2009
• Issued: 10/23/2018
• Est. Priority Date: 11/30/2009
• Status: Active Grant

• Current Assignee: Infineon Technologies AG
• Original Assignee: Infineon Technologies AG
• Inventors: Elian, Klaus, Petz, Martin, Schindler, Uwe, Theuss, Horst, Koller, Adolf
• Primary Examiner(s): Schindler, David M.
• Application Number:
  US12/627,848
• Publication Number:
  US 20110127998A1
• Time in Patent Office: 3,249 Days
• Field of Search: 324249, 324251, 324252
• CPC Class Codes: B82Y 25/00 Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
• CPC Class Codes: G01D 5/24438 Special design of the sensing element or scale
• CPC Class Codes: G01P 1/026 for speed measuring devices, e.g. pulse generator
• CPC Class Codes: G01P 3/488 delivered by variable reluctance detectors
• CPC Class Codes: G01R 33/093 using multilayer structures, e.g. giant magnetoresistance sensors thin magnetic films H01F10/00
• CPC Class Codes: H01L 2224/32245 the item being metallic
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/48257 connecting the wire to a die pad of the item
• CPC Class Codes: H01L 2224/73265 Layer and wire connectors
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H10N 50/80 Constructional details

Abstract

An integrated circuit includes a leadframe, and a die having a top surface, a bottom surface, and a plurality of perimeter sides and including at least one magnetic field sensor element disposed proximate to the top surface, wherein the bottom surface is bonded to the leadframe. A molded magnetic material encapsulates the die and at least a portion of the leadframe, and provides a magnetic field substantially perpendicular to the top surface of the die. A non-magnetic material is disposed between the die and the molded magnetic material at least along perimeter sides of the die intersecting a lateral magnetic field component which is parallel to the top surface of the die.

Claims

1. An integrated circuit comprising:

a leadframe;

a die having a top surface, a bottom surface, and a plurality of perimeter sides and including at least one magnetoresistive magnetic field sensor element disposed proximate to the top surface, wherein the bottom surface is bonded to the leadframe;

a molded magnetic material encapsulating the die and at least a portion of the leadframe, and providing a magnetic field having a vertical component perpendicular to the top surface of the die; and

a first non-magnetic material disposed between the die and the molded magnetic material only along the plurality of perimeter sides of the die, so that the first non-magnetic material spaces the molded magnetic material away from the plurality of perimeter sides of the die such that a magnitude of a lateral magnetic field component across the top surface of the die is less than a saturation point of the at least one magnetic field sensor.

2. The integrated circuit of claim 1, wherein the first non-magnetic material is disposed at least along perimeter sides which are perpendicular to the lateral magnetic field component.

3. The integrated circuit of claim 1, wherein the first non-magnetic material is disposed between the die and the molded magnetic material along only two perimeter sides of the die.

4. The integrated circuit of claim 1, wherein the first non-magnetic material and the molded magnetic material are disposed in a substantially symmetrical fashion about a centerline of the die which is perpendicular to the lateral magnetic field component.

5. The integrated circuit of claim 1, wherein the first non-magnetic material comprises silicon.

6. The integrated circuit of claim 1, wherein the first non-magnetic material comprises one selected from a group consisting of silicon, glass, ceramic, polyamide plastic, polyphenylenesulfid plastic, cross-linked silicon glues, hardened novalak materials, polyimides, hardened Cresol materials, polybenzoxazoles, and epoxy based materials.

7. The integrated circuit of claim 1, including a second non-magnetic material defined as an isolation layer coating the leadframe, the die, and the first non-magnetic material which electrically isolates the leadframe, the die, and the first non-magnetic material from the molded magnetic material.

8. The integrated circuit of claim 1, wherein the non-magnetic material has a dimension that is further based on dimensions of the molded magnetic material.

9. The integrated circuit of claim 1, wherein the non-magnetic material has a dimension that is further based on a configuration of the at least one magnetoresistive magnetic field sensor element.

10. The integrated circuit of claim 1, wherein the first non-magnetic material is pre-shaped.

11. The integrated circuit of claim 1, wherein the first non-magnetic material does not extend above the top surface of the die.

12. A method for fabricating a semiconductor circuit comprising:

bonding at least a pair of pre-formed strips of non-magnetic material to a leadframe, the pre-formed strips being spaced apart and parallel to one another;

bonding a die to the leadframe between the pre-formed strips, the die having at least a pair of magnetoresistive sensor elements disposed on a top surface and spaced apart from one another along an axis, the die positioned such that the axis intersect the pair of pre-formed strips;

applying an isolation layer over the die, leadframe, and pre-formed strips;

encapsulating the die, the pre-formed strips, and at least a portion of the leadframe in a molded magnetic material, the isolation layer electrically isolating the die, leadframe, and pre-formed strips from the molded magnetic material; and

magnetizing the molded magnetic material to form a magnetic field substantially perpendicular to the top surface of the die and such that any magnetic field component parallel to the top surface is parallel to the axis.

13. The method of claim 12, wherein each of the pre-formed strips has a dimension from a perimeter side to the molded magnetic material that spaces the molded magnetic material away from the die such that a magnitude of the magnetic field component parallel to the top surface is less than a saturation level of the magnetoresistive sensor elements.

14. An integrated circuit comprising:

a leadframe;

a die having a top surface, a bottom surface, and a plurality of perimeter sides and including at least one magnetoresistive magnetic field sensor element disposed proximate to the top surface, wherein the bottom surface is bonded to the leadframe;

a molded magnetic material encapsulating the die and at least a portion of the leadframe; and

a first non-magnetic material disposed between the die and the molded magnetic material only along the plurality of perimeter sides of the die, so that the first non-magnetic material spaces the molded magnetic material away from the plurality of perimeter sides of the die, and where the first non-magnetic material only extends along the plurality of perimeter sides between the bottom surface and the top surface.

15. The integrated circuit of claim 14, comprising a second non-magnetic material in the form of an insulating layer coating the die, the first non-magnetic material and at least a portion of the leadframe.