Integrated quartz MEMS tuning fork resonator/oscillator

• US 10,110,198 B1
• Filed: 12/17/2015
• Issued: 10/23/2018
• Est. Priority Date: 12/17/2015
• Status: Active Grant

• Current Assignee: HRL Laboratories LLC (The Boeing Co.)
• Original Assignee: HRL Laboratories LLC (The Boeing Co.)
• Inventors: Kubena, Randall L.
• Primary Examiner(s): Dougherty, Thomas
• Application Number:
  US14/973,701
• Time in Patent Office: 1,041 Days
• Field of Search: 310365, 310366, 310370
• CPC Class Codes: H03H 2003/026 the resonators or networks being of the tuning fork type
• CPC Class Codes: H03H 3/02 for the manufacture of piezoelectric or electrostrictive resonators or networks H03H3/08 takes precedence
• CPC Class Codes: H03H 9/0547 consisting of a vertical arrangement H03H9/0566 takes precedence
• CPC Class Codes: H03H 9/1021 the BAW device being of the cantilever type
• CPC Class Codes: H03H 9/125 Driving means, e.g. electrodes, coils
• CPC Class Codes: H03H 9/13 for networks consisting of piezoelectric or electrostrictive materials H03H9/145 takes precedence
• CPC Class Codes: H03H 9/215 consisting of quartz

Abstract

A piezoelectric quartz tuning fork resonator having a pair of tines formed from a common quartz plate, with a middle electrode and two outer electrodes being disposed at or on top and bottom surfaces of each of the pair of tines and interconnected such that the outer electrodes at or on the top and bottom surfaces of a first one of the pair of tines are connected in common with the middle electrodes on the top and bottom surfaces of a second one of the pair of tines and further interconnected such that the outer electrodes at or on the top and bottom surfaces of the second one of the pair of tines are connected in common with the middle electrodes on the top and bottom surfaces of the first one of the pair of tines.

Claims

1. A piezoelectric quartz tuning fork resonator formed of a quartz plate with a pair of tines projecting from of a mounting portion of said quartz plate, each of the pair of times having top and bottom major surfaces, each of the pair of tines having a middle electrode and two outer electrodes disposed on the top and bottom major surfaces of each of said pair of tines, the pairs of tunes also having side surfaces disposed essentially orthogonally to the top and bottom major surfaces thereof, the side surfaces of said tines having no electrodes disposed thereon, the electrodes on the top and bottom major surfaces of the pair of tines being interconnected such that the outer electrode on the top major surface of a first one of said pair of tines is connected to the outer electrode on the bottom major surface of said first one of said pair of tines by means of a first conductive via penetrating said quartz plate, said first conductive via also being interconnected with the middle electrodes on the top and bottom major surfaces of a second one of said pair of tines, the electrodes on the top and bottom major surfaces of the pair of tines being further interconnected such that the outer electrode on the top major surface of the second one of said pair of tines is connected to the outer electrode on the bottom major surface of said second one of said pair of tines by means of a second conductive via penetrating said quartz plate, said second conductive via also being interconnected with the middle electrodes on the top and bottom major surfaces of the first one of said pair of tines.

2. The piezoelectric quartz tuning fork resonator of claim 1 such that when an alternating electric field is applied, in use, at some instant in time opposing lateral electric fields are produced by the middle electrode of a particular polarity on the top and bottom surfaces of the quartz tines and two outer electrodes on each side of the tines of opposite polarity.

3. The piezoelectric quartz tuning fork resonator of claim 1 wherein the two outer electrodes disposed on the top and bottom major surfaces of each of said pair of tines surrounds the middle electrodes on the top and bottom major surfaces of each of said pair of tines.

4. The piezoelectric quartz tuning fork resonator of claim 3 wherein each outer electrode comprises first, second and third electrode portions, the first and third portions of each each outer electrode paralleling the side surfaces of said tines while the second portion of each each outer electrode paralleling an end tip of each each outer electrode.

5. The piezoelectric quartz tuning fork resonator of claim 4 the first and third electrode portions are each closely spaced to said side surfaces and wherein the second electrode portions are likewise closely spaced to said end tips.

6. The piezoelectric quartz tuning fork resonator of claim 1 wherein the first conductive via is coupled to a first bonding pad disposed adjacent to said first conductive via and wherein the second conductive via is coupled to a second bonding pad disposed adjacent to said second conductive via.

7. The piezoelectric quartz tuning fork resonator of claim 1 wherein the first conductive via also comprises a first bonding pad wherein the second conductive via comprises a second bonding pad.

8. The piezoelectric quartz tuning fork resonator of claim 1 wherein the middle electrode and the two outer electrodes disposed on the top and bottom major surfaces of each of said pair of tines each have a same linewidth.

9. The piezoelectric quartz tuning fork resonator of claim 8 wherein the two outer electrodes are disposed away from, bit no more than a linewidth away from, the side edges of the tines.