Coaxial distance measurement via folding of triangulation sensor optics path
First Claim
1. An apparatus configured for scribing an optical coating on a transparent substrate having a first side and a second side with the optical coating disposed on one of the first side and the second side, the apparatus comprising:
- a stage having one side and an opposing side, and an aperture through the stage;
a scribe laser having a focus lens, a scribe laser beam from the scribe laser, wherein the scribe laser is located on one side of the stage and the transparent substrate is located to the opposing side of the stage, wherein the scribe laser beam is configured to pass through the aperture in the stage to impinge upon the transparent substrate substantially orthogonally, and wherein the scribe laser beam is further configured to ablate the optical coating;
a first mirror attached to the opposing side of the stage;
a second mirror attached to the opposing side of the stage; and
a triangulation-based distance sensor attached to the opposing side of the stage and comprising a triangulation laser and a detector, the triangulation-based distance sensor configured such that a triangulation laser beam from the triangulation laser is emitted substantially parallel to the transparent substrate, impinges on and is reflected from the first mirror to impinge on the transparent substrate at a first acute angle of incidence measured with respect to a normal to the transparent substrate, is reflected from the transparent substrate at a second acute angle measured with respect to the normal to the transparent substrate to the second mirror, and is reflected from the second mirror to the detector,wherein the apparatus determines a distance between the one of a first side and a second side of the transparent substrate with the optical coating and the focus lens of the scribe laser based on a measured position of the reflected triangulation laser beam on the detector, andwherein a span of the first acute angle and the second acute angle is a third acute angle which is bisected by the scribe laser beam passing through the aperture in the stage.
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Abstract
This disclosure provides apparatus and methods for scribing a substrate. In one aspect, an apparatus includes optics for focusing a scribe beam onto a substrate and a beam focus adjustment mechanism for adjusting the optics. A triangulation-based distance sensor determines a distance between the triangulation-based distance sensor and the substrate, with the triangulation-based distance sensor being positioned at a location offset from the scribe beam. Reflecting elements are positioned to reflect an incident beam from the triangulation-based distance sensor'"'"'s source to the substrate and then back to the triangulation-based distance sensor'"'"'s detector. The beam focus adjustment mechanism adjusts the optics based on the distance between the triangulation-based distance sensor and the substrate so that the scribe beam is focused at a desired position on the substrate.
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Citations
20 Claims
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1. An apparatus configured for scribing an optical coating on a transparent substrate having a first side and a second side with the optical coating disposed on one of the first side and the second side, the apparatus comprising:
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a stage having one side and an opposing side, and an aperture through the stage; a scribe laser having a focus lens, a scribe laser beam from the scribe laser, wherein the scribe laser is located on one side of the stage and the transparent substrate is located to the opposing side of the stage, wherein the scribe laser beam is configured to pass through the aperture in the stage to impinge upon the transparent substrate substantially orthogonally, and wherein the scribe laser beam is further configured to ablate the optical coating; a first mirror attached to the opposing side of the stage; a second mirror attached to the opposing side of the stage; and a triangulation-based distance sensor attached to the opposing side of the stage and comprising a triangulation laser and a detector, the triangulation-based distance sensor configured such that a triangulation laser beam from the triangulation laser is emitted substantially parallel to the transparent substrate, impinges on and is reflected from the first mirror to impinge on the transparent substrate at a first acute angle of incidence measured with respect to a normal to the transparent substrate, is reflected from the transparent substrate at a second acute angle measured with respect to the normal to the transparent substrate to the second mirror, and is reflected from the second mirror to the detector, wherein the apparatus determines a distance between the one of a first side and a second side of the transparent substrate with the optical coating and the focus lens of the scribe laser based on a measured position of the reflected triangulation laser beam on the detector, and wherein a span of the first acute angle and the second acute angle is a third acute angle which is bisected by the scribe laser beam passing through the aperture in the stage. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification