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Coaxial distance measurement via folding of triangulation sensor optics path

  • US 10,112,258 B2
  • Filed: 03/30/2012
  • Issued: 10/30/2018
  • Est. Priority Date: 03/30/2012
  • Status: Active Grant
First Claim
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1. An apparatus configured for scribing an optical coating on a transparent substrate having a first side and a second side with the optical coating disposed on one of the first side and the second side, the apparatus comprising:

  • a stage having one side and an opposing side, and an aperture through the stage;

    a scribe laser having a focus lens, a scribe laser beam from the scribe laser, wherein the scribe laser is located on one side of the stage and the transparent substrate is located to the opposing side of the stage, wherein the scribe laser beam is configured to pass through the aperture in the stage to impinge upon the transparent substrate substantially orthogonally, and wherein the scribe laser beam is further configured to ablate the optical coating;

    a first mirror attached to the opposing side of the stage;

    a second mirror attached to the opposing side of the stage; and

    a triangulation-based distance sensor attached to the opposing side of the stage and comprising a triangulation laser and a detector, the triangulation-based distance sensor configured such that a triangulation laser beam from the triangulation laser is emitted substantially parallel to the transparent substrate, impinges on and is reflected from the first mirror to impinge on the transparent substrate at a first acute angle of incidence measured with respect to a normal to the transparent substrate, is reflected from the transparent substrate at a second acute angle measured with respect to the normal to the transparent substrate to the second mirror, and is reflected from the second mirror to the detector,wherein the apparatus determines a distance between the one of a first side and a second side of the transparent substrate with the optical coating and the focus lens of the scribe laser based on a measured position of the reflected triangulation laser beam on the detector, andwherein a span of the first acute angle and the second acute angle is a third acute angle which is bisected by the scribe laser beam passing through the aperture in the stage.

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