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Mass flow controller with near field communication and/or USB interface to receive power from external device

  • US 10,114,387 B2
  • Filed: 03/07/2014
  • Issued: 10/30/2018
  • Est. Priority Date: 03/12/2013
  • Status: Active Grant
First Claim
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1. A mass flow controller comprising:

  • an inlet for receiving fluid;

    a flow path in which the fluid passes through the mass flow controller;

    a near-field communication component configured to communicate with an external device and to receive power from the external device to power at least one of a memory, a configuration setting logic component, and a display of the mass flow controller;

    a mass flow sensor for providing a signal corresponding to mass flow of the fluid through the flow path;

    an valve for regulating a flow of the fluid out of an outlet of the mass flow controller; and

    at least one processing component configured to execute instructions to perform operations comprising controlling the valve based on a desired mass flow rate;

    wherein the near-field communication component is configured to cause the logic component to automatically execute another set of instructions to perform operations comprising;

    adjusting a configuration parameter based on received input.

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