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Angular velocity sensor, electronic apparatus, and mobile object

  • US 10,119,823 B2
  • Filed: 04/17/2015
  • Issued: 11/06/2018
  • Est. Priority Date: 04/22/2014
  • Status: Active Grant
First Claim
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1. An angular velocity sensor comprising:

  • a substrate;

    a plurality of mass units which are disposed above the substrate;

    a plurality of coupling units which couple the mass units that are adjacent to each other, among the plurality of mass units, the adjacent mass units being connected to opposing ends of one of the coupling units; and

    a plurality of drive units which are disposed above the substrate and are connected to the coupling units,each of the plurality of drive units having a fixing unit fixed to the substrate, wherein the plurality of drive units respectively drive the mass units that are adjacent to each other through the plurality of coupling units using the fixing unit as a center of the motion, andeach of the plurality of drive units is connected to one of the plurality of coupling units through a moving unit at a location on the coupling unit between the opposing ends.

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