Angular velocity sensor, electronic apparatus, and mobile object
First Claim
1. An angular velocity sensor comprising:
- a substrate;
a plurality of mass units which are disposed above the substrate;
a plurality of coupling units which couple the mass units that are adjacent to each other, among the plurality of mass units, the adjacent mass units being connected to opposing ends of one of the coupling units; and
a plurality of drive units which are disposed above the substrate and are connected to the coupling units,each of the plurality of drive units having a fixing unit fixed to the substrate, wherein the plurality of drive units respectively drive the mass units that are adjacent to each other through the plurality of coupling units using the fixing unit as a center of the motion, andeach of the plurality of drive units is connected to one of the plurality of coupling units through a moving unit at a location on the coupling unit between the opposing ends.
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Accused Products
Abstract
An angular velocity sensor includes a substrate; a plurality of mass units which is disposed above the substrate; respective coupling units which couple the respective mass units (a first mass unit and a third mass unit, the third mass unit and a second mass unit, the second mass unit and a fourth mass unit, and a fourth mass unit and the first mass unit) adjacent to each other, among the plurality of mass units; and respective drive units which are disposed above the substrate and are connected to the respective coupling units, and the respective drive units drive the respective mass units (the first mass unit and the third mass unit, the third mass unit and the second mass unit, the second mass unit and the fourth mass unit, and the fourth mass unit and the first mass unit) adjacent to each other through the respective coupling units.
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Citations
22 Claims
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1. An angular velocity sensor comprising:
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a substrate; a plurality of mass units which are disposed above the substrate; a plurality of coupling units which couple the mass units that are adjacent to each other, among the plurality of mass units, the adjacent mass units being connected to opposing ends of one of the coupling units; and a plurality of drive units which are disposed above the substrate and are connected to the coupling units, each of the plurality of drive units having a fixing unit fixed to the substrate, wherein the plurality of drive units respectively drive the mass units that are adjacent to each other through the plurality of coupling units using the fixing unit as a center of the motion, and each of the plurality of drive units is connected to one of the plurality of coupling units through a moving unit at a location on the coupling unit between the opposing ends. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. An angular velocity sensor comprising:
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a substrate; a plurality of mass units which are disposed above the substrate; a plurality of coupling units which couple the mass units that are adjacent to each other, among the plurality of mass units, the adjacent mass units being connected to opposing ends of one of the coupling units; a plurality of drive units which are disposed above the substrate; and each of the plurality of drive units having a fixing unit fixed to the substrate, wherein each of the plurality of drive units is connected to a corresponding one of the coupling units respectively, and each of the plurality of drive units directly drives the corresponding one of the plurality of coupling units to vibrate the mass units through the corresponding coupling unit using the fixing unit as a center of the motion.
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21. An angular velocity sensor comprising:
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a substrate; a first mass unit connected to a first fixing unit via a first spring, the first fixing unit fixed to the substrate; a second mass unit connected to a second fixing unit via a second spring, the second fixing unit fixed to the substrate; a first coupling unit connecting the first mass unit and the second mass unit; a first drive unit connected to a third fixing unit fixed to the substrate and connected to the first coupling unit;
whereinthe first drive unit directly drives the first coupling unit to vibrate the first mass unit and the second mass unit using the first fixing unit as a center of motion. - View Dependent Claims (22)
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Specification