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Illumination method, illumination optical device, and exposure device

  • US 10,120,283 B2
  • Filed: 11/30/2011
  • Issued: 11/06/2018
  • Est. Priority Date: 06/06/2011
  • Status: Active Grant
First Claim
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1. An illumination method for illuminating an illumination objective surface by using a light from a light source, the illumination method comprising:

  • setting a control amount for controlling a plurality of optical elements, to control a state of an incident light coming into each of the plurality of optical elements, the plurality of optical elements being arranged in parallel and being capable of controlling the state of the incident light;

    illuminating the illumination objective surface with the light from the light source via the plurality of optical elements;

    monitoring time-integrated energy of the light from the light source; and

    correcting the control amount for the plurality of optical elements based on a result of the monitoring of the time-integrated energy.

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