Illumination method, illumination optical device, and exposure device
First Claim
1. An illumination method for illuminating an illumination objective surface by using a light from a light source, the illumination method comprising:
- setting a control amount for controlling a plurality of optical elements, to control a state of an incident light coming into each of the plurality of optical elements, the plurality of optical elements being arranged in parallel and being capable of controlling the state of the incident light;
illuminating the illumination objective surface with the light from the light source via the plurality of optical elements;
monitoring time-integrated energy of the light from the light source; and
correcting the control amount for the plurality of optical elements based on a result of the monitoring of the time-integrated energy.
1 Assignment
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Accused Products
Abstract
There is provided an illumination method for illuminating an illumination objective surface by using a light from a light source. The illumination method includes setting control amount for controlling a plurality of optical elements, to control a state of an incident light coming into each of the plurality of optical elements, the plurality of optical elements being arranged in parallel and being capable of controlling the state of the incident light; illuminating the illumination objective surface with the light from the light source via the plurality of optical elements; monitoring integrated energy of the light from the light source; and correcting the control amount for the plurality of optical elements on the basis of a result of the monitoring of the integrated energy.
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Citations
36 Claims
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1. An illumination method for illuminating an illumination objective surface by using a light from a light source, the illumination method comprising:
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setting a control amount for controlling a plurality of optical elements, to control a state of an incident light coming into each of the plurality of optical elements, the plurality of optical elements being arranged in parallel and being capable of controlling the state of the incident light; illuminating the illumination objective surface with the light from the light source via the plurality of optical elements; monitoring time-integrated energy of the light from the light source; and correcting the control amount for the plurality of optical elements based on a result of the monitoring of the time-integrated energy. - View Dependent Claims (2, 3, 4, 5, 6)
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7. An illumination optical apparatus for illuminating an illumination objective surface by using a light from a light source, the illumination optical apparatus comprising:
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a spatial light modulator which is arranged in an optical path for the light from the light source and which has a plurality of optical elements capable of controlling a state of an incident light coming into each of the plurality of optical elements; a monitor unit which monitors time-integrated energy of the light from the light source; and a control system which sets a control amount for controlling the plurality of optical elements, to control the state of the incident light, and which corrects the control amount based on the time-integrated energy monitored by the monitor unit. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15)
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16. An illumination method for illuminating an illumination objective surface by using a light from a light source, the illumination method comprising:
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setting a posture control amount for a plurality of optical elements which are arranged in parallel and a posture of each of which is changeable; measuring an energy of the light propagating from the light source to the illumination objective surface; and changing the posture control amount for the plurality of optical elements so as to reduce posture changes of the plurality of optical elements by using an information related to the measured energy of the light, wherein the measured energy of the light indirectly corresponds to an average temperature of the plurality of optical elements. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 28, 29, 30, 31, 34, 35)
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27. An illumination optical apparatus for illuminating an illumination objective surface by using a light from a light source, the illumination optical apparatus comprising:
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a spatial light modulator having a plurality of optical elements which are arranged in parallel and a posture of each of which is changeable; a sensor which measures an energy of the light propagating from the light source to the illumination objective surface; and a controller which controls the spatial light modulator, wherein the controller performs; setting a posture control amount for the plurality of optical elements; and changing the posture control amount for the plurality of optical elements so as to reduce posture changes of the plurality of optical elements by using an information related to the measured energy of the light, and wherein the measured energy of the light indirectly corresponds to an average temperature of the plurality of optical elements. - View Dependent Claims (32, 33, 36)
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Specification