Object positioning in lithography
First Claim
1. An object positioning system comprising:
- an object to be positioned;
a measurement system with one or more sensors configured to measure the position of the object in one or more degrees of freedom relative to a reference, wherein each of the one or more sensors of the measurement system has an associated measurement area on the object of which the position in one or more degrees of freedom relative to the reference is measured and wherein a location of at least one measurement area on the object is dependent on the position of the object in at least one degree of freedom;
an actuator system with one or more actuators configured to position the object;
a control system configured to drive the actuator system in dependency of an output of the measurement system and a set point representing a desired position of the object,wherein the control system comprises an observer with a dynamic model of the object to estimate an internal dynamic behavior of the object based on an input to the object and the output of the measurement system,wherein the dynamic model includes a dependency of the location of at least one measurement area on the position of the object in at least one degree of freedom, andwherein the control system is configured to drive the actuator system in dependency of an output of the observer, andwherein the control system is configured to compensate the output of the measurement system for the internal dynamic behavior using the estimated internal dynamic behavior.
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Accused Products
Abstract
An object positioning system includes an object; a measurement system to measure the position of the object, wherein each sensor of the measurement system has an associated measurement area on the object and wherein a location of at least one measurement area on the object is dependent on the position of the object; an actuator system to position the object; a control system configured to drive the actuator system, wherein the control system includes an observer with a dynamic model of the object to estimate an internal dynamic behavior of the object, wherein the dynamic model includes the dependency of the location of at least one measurement area on the position of the object, and wherein the control system is configured to drive the actuator system in dependency of an output of the observer.
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Citations
20 Claims
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1. An object positioning system comprising:
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an object to be positioned; a measurement system with one or more sensors configured to measure the position of the object in one or more degrees of freedom relative to a reference, wherein each of the one or more sensors of the measurement system has an associated measurement area on the object of which the position in one or more degrees of freedom relative to the reference is measured and wherein a location of at least one measurement area on the object is dependent on the position of the object in at least one degree of freedom; an actuator system with one or more actuators configured to position the object; a control system configured to drive the actuator system in dependency of an output of the measurement system and a set point representing a desired position of the object, wherein the control system comprises an observer with a dynamic model of the object to estimate an internal dynamic behavior of the object based on an input to the object and the output of the measurement system, wherein the dynamic model includes a dependency of the location of at least one measurement area on the position of the object in at least one degree of freedom, and wherein the control system is configured to drive the actuator system in dependency of an output of the observer, and wherein the control system is configured to compensate the output of the measurement system for the internal dynamic behavior using the estimated internal dynamic behavior. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method for positioning an object, the method comprising:
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providing a measurement system with one or more sensors configured to measure a position of the object in one or more degrees of freedom relative to a reference, wherein each of the one or more sensors of the measurement system has an associated measurement area on the object of which the position in one or more degrees of freedom relative to the reference is measured, and wherein a location of at least one measurement area on the object is dependent on the position of the object in at least one degree of freedom; providing an actuator system with one or more actuators configured to position the object; providing a set point representing a desired position of the object; providing a dynamic model of the object to estimate an internal dynamic behavior of the object, wherein the dynamic model includes a dependency of the location of at least one measurement area on the position of the object in at least one degree of freedom; estimating the internal dynamic behavior of the object using the dynamic model by providing to the dynamic model, an input to the object and the by the measurement system measured position of the object; compensating the output of the measurement system for the internal dynamic behavior using the estimated internal dynamic behavior; and positioning the object with the actuator system based on the set point and the by the measurement system measured position of the object while taking the internal dynamical behavior into account. - View Dependent Claims (15, 16, 17, 18)
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19. A non-transitory computer-readable medium comprising instructions, when executed, configured to cause a computer system to at least:
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obtain a measured position of an object using a measurement system, the measurement system having one or more sensors configured to measure the position of the object in one or more degrees of freedom relative to a reference, wherein each of the one or more sensors of the measurement system has an associated measurement area on the object of which the position in one or more degrees of freedom relative to the reference is measured, and wherein a location of at least one measurement area on the object is dependent on the position of the object in at least one degree of freedom; estimate an internal dynamic behavior of the object using a dynamic model of the object by providing to the dynamic model, an input to the object and the by the measurement system measured position of the object, the dynamic model configured to estimate the internal dynamic behavior of the object and the dynamic model including a dependency of the location of at least one measurement area on the position of the object in at least one degree of freedom; cause compensation of the output of the measurement system for the internal dynamic behavior using the estimated internal dynamic behavior; and output information to enable positioning of the object with an actuator system based on a set point representing a desired position of the object and the by the measurement system measured position of the object while taking the internal dynamical behavior into account. - View Dependent Claims (20)
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Specification