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Method of making multi-electrode molecular sensing devices

  • US 10,125,420 B2
  • Filed: 10/09/2017
  • Issued: 11/13/2018
  • Est. Priority Date: 07/26/2016
  • Status: Active Grant
First Claim
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1. A method of manufacturing a structure usable in a molecular sensor device, the method comprising:

  • forming a stack comprising;

    providing a first outer dielectric layer;

    depositing a first electrode layer on the first outer dielectric layer;

    depositing an inner dielectric layer having a first thickness on the first electrode layer;

    depositing a second electrode layer on the inner dielectric layer; and

    depositing a second outer dielectric layer having a second thickness on the second electrode layer, wherein the second thickness of the second outer dielectric layer is at least one order of magnitude greater than the first thickness of the inner dielectric layer;

    slicing through the stack at least once at an angle to the layers in the stack to form a plurality of chips from the sliced portions of the stack;

    attaching the plurality of chips to a substrate so that the sliced portions of the first electrode layer and the second electrode layer form a plurality of pairs of electrode sheets at an angle to a substrate plane defined by the substrate, and so that the sliced portions of the inner dielectric layer forms a plurality of inner dielectric sheets with each inner dielectric sheet between each electrode sheet in each pair of electrode sheets; and

    forming a groove located on an exposed end portion of each inner dielectric sheet.

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