Vibration and shock robust gyroscope
First Claim
1. A microelectromechanical systems (MEMS) device comprising:
- a substrate;
a movable mass having an end region laterally displaced away from a central region of said movable mass, wherein an opening extends through said end region;
a suspension structure located in said opening, said suspension structure including an anchor coupled to a surface of said substrate, a first rigid link coupled to and extending from a first side of said anchor, and a second rigid link coupled to and extending from a second side of said anchor, each of said first and second rigid links having a lengthwise dimension oriented perpendicular to a drive direction of said movable mass, said drive direction being substantially parallel to said surface of said substrate; and
a spring system located in said opening, said spring system including;
a first spring head coupled to a first end of said first rigid link;
a second spring head coupled a second end of said second rigid link;
a first drive spring coupled to said first spring head and coupled to said movable mass; and
a second drive spring coupled to said second spring head and coupled to said movable mass, wherein said movable mass is resiliently suspended above said surface of said substrate via said suspension structure and said spring system, said spring system enables drive motion of said movable mass in said drive direction and enables sense motion of said movable mass in a sense direction that is perpendicular to said surface of said substrate.
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Accused Products
Abstract
A MEMS device includes a movable mass having a central region overlying a sense electrode and an opening in which a suspension structure and spring system are located. The suspension structure includes an anchor coupled to a substrate and rigid links extending from opposing sides of the anchor. The spring system includes a first and second spring heads coupled to each of the rigid links. A first drive spring is coupled to the first spring head and to the movable mass, and a second drive spring is coupled to the second spring head and to the movable mass. The movable mass is resiliently suspended above the surface of the substrate via the suspension structure and the spring system. The spring system enables drive motion of the movable mass in the drive direction and sense motion of the movable mass in a sense direction perpendicular to the surface of the substrate.
42 Citations
20 Claims
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1. A microelectromechanical systems (MEMS) device comprising:
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a substrate; a movable mass having an end region laterally displaced away from a central region of said movable mass, wherein an opening extends through said end region; a suspension structure located in said opening, said suspension structure including an anchor coupled to a surface of said substrate, a first rigid link coupled to and extending from a first side of said anchor, and a second rigid link coupled to and extending from a second side of said anchor, each of said first and second rigid links having a lengthwise dimension oriented perpendicular to a drive direction of said movable mass, said drive direction being substantially parallel to said surface of said substrate; and a spring system located in said opening, said spring system including; a first spring head coupled to a first end of said first rigid link; a second spring head coupled a second end of said second rigid link; a first drive spring coupled to said first spring head and coupled to said movable mass; and a second drive spring coupled to said second spring head and coupled to said movable mass, wherein said movable mass is resiliently suspended above said surface of said substrate via said suspension structure and said spring system, said spring system enables drive motion of said movable mass in said drive direction and enables sense motion of said movable mass in a sense direction that is perpendicular to said surface of said substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 17, 20)
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15. A microelectromechanical systems (MEMS) device comprising:
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a substrate; a movable mass having a first end region laterally displaced away from a second end region with a central region interposed between said first and second end regions, wherein a first opening extends through said first end region and a second opening extends through said second end region; a first suspension structure located in said first opening, said first suspension structure including a first anchor coupled to a surface of said substrate, a first rigid link coupled to and extending from a first side of said first anchor, and a second rigid link coupled to and extending from a second side of said first anchor, each of said first and second rigid links having a lengthwise dimension oriented perpendicular to a drive direction of said movable mass, said drive direction being substantially parallel to said surface of said substrate; a first spring system located in said first opening, said first spring system including a first spring head coupled to a first end of said first rigid link, a second spring head coupled a second end of said second rigid link, a first drive spring coupled to said first spring head and coupled to said movable mass, and a second drive spring coupled to said second spring head and coupled to said movable mass; a second suspension structure located in said second opening, said second suspension structure including a second anchor coupled to said surface of said substrate, a third rigid link coupled to and extending from a third side of said second anchor, and a fourth rigid link coupled to and extending from a fourth side of said second anchor, each of said third and fourth rigid links having said lengthwise dimension oriented perpendicular to said drive direction of said movable mass; and a second spring system located in said second opening, said second spring system including a third spring head coupled to a third end of said third rigid link, a fourth spring head coupled a fourth end of said fourth rigid link, a third drive spring coupled to said third spring head and coupled to said movable mass, a fourth drive spring coupled to said fourth spring head and coupled to said movable mass, each of said first, second, third, and fourth spring heads including a torsion beam configured to enable rotation about an axis oriented substantially parallel to said drive direction, wherein said movable mass is resiliently suspended above said surface of said substrate via said first and second suspension structures and said first and second spring systems, said first and second spring systems enabling drive motion of said movable mass in said drive direction and enabling sense motion of said movable mass in a sense direction that is perpendicular to said surface of said substrate. - View Dependent Claims (16)
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18. A microelectromechanical systems (MEMS) device comprising:
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a substrate; a first movable mass having a first end region laterally displaced away from a second end region with a first central region interposed between said first and second end regions, wherein a first opening extends through said first end region and a second opening extends through said second end region; a second movable mass having a third end region laterally displaced away from a fourth end region with a second central region interposed between said third and fourth end regions, wherein a third opening extends through said third end region and a fourth opening extends through said fourth end region; suspension structures located in each of said first, second, third, and fourth openings, each of said suspension structures including an anchor coupled to a surface of said substrate, a first rigid link coupled to and extending from a first side of said first anchor, and a second rigid link coupled to and extending from a second side of said first anchor, each of said first and second rigid links having a lengthwise dimension oriented perpendicular to a drive direction of said movable mass, said drive direction being substantially parallel to said surface of said substrate; spring systems located in each of said first, second, third, and fourth openings, each of said first spring systems including a first spring head coupled to a first end of said first rigid link, a second spring head coupled a second end of said second rigid link, a first drive spring coupled to said first spring head and coupled to an associated one of said first and second movable masses, and a second drive spring coupled to said second spring head and said associated one of said first and second movable masses; and a couple spring structure having a stiff beam coupled to said surface of said substrate via a beam anchor, said couple spring structure interconnecting said first movable mass with said second movable mass, a second lengthwise dimension of said stiff beam being oriented perpendicular to said drive direction, wherein said first and second movable masses are resiliently suspended above said surface of said substrate via said suspension structures and said spring systems, said spring systems enable drive motion of said movable mass in said drive direction and enable sense motion of said first and second movable masses in a sense direction that is perpendicular to said surface of said substrate, and said couple spring structure is configured to pivot about an axis that is substantially perpendicular to said surface of said substrate in response to said drive motion of said first and second movable masses such that said first and second movable masses move in phase opposition with one another. - View Dependent Claims (19)
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Specification