Optical sensor

• US 10,126,168 B1
• Filed: 03/05/2018
• Issued: 11/13/2018
• Est. Priority Date: 08/30/2017
• Status: Expired due to Fees

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Akimoto, Yosuke, Kousai, Shouhei, Imai, Kaita, Nishigaki, Michihiko, Onozuka, Yutaka, Nagai, Miyu
• Primary Examiner(s): Kim, Kiho
• Application Number:
  US15/911,349
• Time in Patent Office: 253 Days
• CPC Class Codes: G01J 1/0492 using at least two different filters
• CPC Class Codes: G01J 1/58 using luminescence generated by light
• CPC Class Codes: G01J 2003/1213 Filters in general, e.g. dichroic, band
• CPC Class Codes: G01J 2003/2806 Array and filter array
• CPC Class Codes: G01J 3/0229 using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
• CPC Class Codes: G01J 3/0259 Monolithic
• CPC Class Codes: G01J 3/0262 Constructional arrangements for removing stray light
• CPC Class Codes: G01J 3/2803 using photoelectric array detector
• CPC Class Codes: G01J 3/4406 Fluorescence spectrometry
• CPC Class Codes: G01N 21/6454 using an integrated detector array
• CPC Class Codes: H01L 27/14603 Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
• CPC Class Codes: H01L 27/14618 Containers
• CPC Class Codes: H01L 27/14621 Colour filter arrangements
• CPC Class Codes: H01L 27/14623 Optical shielding

Abstract

According to one embodiment, an optical sensor includes a first substrate, a first insulating film and a light-shielding film. The first substrate has a light detecting region detecting fluorescence generated from a fluorescent material by light with which irradiation is performed from a lateral side. The first insulating film is provided on the first substrate. The light-shielding film is provided, at least, on a side surface of the first substrate to which the light enters, on a side surface of the first insulating film and above a region excluding a region corresponding to the light detecting region of the first insulating film.

Claims

1. An optical sensor comprising:

a first substrate having a light detecting region detecting fluorescence generated from a fluorescent material by light with which irradiation is performed from a lateral side;

a first insulating film provided on the first substrate; and

a light-shielding film provided, at least, on a side surface of the first substrate to which the light enters, on a side surface of the first insulating film and above a region excluding a region corresponding to the light detecting region of the first insulating film.

2. The sensor of claim 1, further comprising

a color filter provided above the first insulating film, wherein

the light-shielding film shields the light entering a side surface of the color filter.

3. The sensor of claim 1, wherein

the light detecting region includes a photoelectric conversion element, the first substrate comprises a recess in which the light-shielding film is provided, and the recess is deeper than a position of a layer in which the photoelectric conversion element is formed.

4. The sensor of claim 1, wherein

the light-shielding film is one of a metal material and an insulation material, and when the light-shielding film is made of the metal material, a second insulating film is provided between the first substrate and the light-shielding film.

5. The sensor of claim 1, further comprising

a light transmitting film provided on the light-shielding film in a periphery of the light detecting region, and transmitting the light.

6. The sensor of claim 5, further comprising

a second substrate provided on the light transmitting film, covering the light detecting region, and having a light shielding property.

7. The sensor of claim 6, further comprising

a third insulating film provided between the light-shielding film and the light transmitting film.

8. The sensor of claim 7, wherein

the second substrate comprises a filter absorbing the light from the second substrate.

9. The sensor of claim 8, wherein

the first insulating film includes a bonding pad, and the bonding pad is exposed from the second substrate.

10. An optical sensor comprising:

a first substrate having a first surface and a second surface parallel to the first surface, and having a light detecting region detecting fluorescence generated from a fluorescent material by light irradiated from a lateral side;

a first insulating film provided on the second surface of the first substrate;

a second substrate supporting the first insulating film; and

a light-shielding film provided on a side surface of the first substrate, on a side surface of the first insulating film, on a side surface of the second substrate and on a region excluding a region corresponding to the light detecting region in the first surface of the first substrate, and shielding the light.

11. The sensor of claim 10, further comprising

a color filter provided above the first surface of the first substrate, wherein

the light-shielding film shields the light entering a side surface of the color filter.

12. The sensor of claim 10, wherein

the light detecting region includes a photoelectric conversion element, the first substrate and the first insulating film comprises a recess arranged in a crossing direction with an incident direction of the light and the light-shielding film is provided therein, and the recess is deeper than a position of a layer in which the photoelectric conversion element is formed.

13. The sensor of claim 10, wherein

the light-shielding film is one of a metal material and an insulation material, and when the light-shielding film is made of the metal material, a second insulating film is provided between the first substrate and the light-shielding film.

14. The sensor of claim 10, further comprising

a light transmitting film provided on the light-shielding film in a periphery of the light detecting region, and transmits the light.

15. The sensor of claim 14, further comprising

a third substrate provided on the light transmitting film, covering the light detecting region, and having a light shielding property.

16. An optical sensor comprising:

a first substrate having a first light detecting region and a second light detecting region which are arranged along an irradiation direction of light and detect fluorescence excited by the light from a fluorescent material;

a first insulating film provided on the first detecting region;

a second insulating film provided on the second light detecting region; and

a light-shielding film provided, at least, on a side surface of the first substrate to which the light enters, on a side surface of the first insulating film and above a region excluding regions corresponding to the first light detecting region of the first insulating film, and shielding the light.

17. The sensor of claim 16, further comprising:

a first color filter provided above the first insulating film; and

a second color filter provided above the second insulating film, wherein

the light-shielding film shields the light entering a side surface of the first color filter.

18. The sensor of claim 16, wherein

the first light detecting region includes a first photoelectric conversion element, the first substrate and the first insulating film are provided in a crossing direction with an incident direction of the light, and have a recess provided the light-shielding film therein, and the recess is deeper than a position of a layer in which the photoelectric conversion element is formed.

19. The sensor of claim 16, wherein

the light-shielding film is one of a metal material and an insulation material, and when the light-shielding film is made of the metal material, a third insulating film is provided between the first substrate and the light-shielding film.

20. The sensor of claim 16, further comprising

a light transmitting film provided on the light-shielding film in a periphery of the first light detecting region, and transmits the light.