Optical sensor
First Claim
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1. An optical sensor comprising:
- a first substrate having a light detecting region detecting fluorescence generated from a fluorescent material by light with which irradiation is performed from a lateral side;
a first insulating film provided on the first substrate; and
a light-shielding film provided, at least, on a side surface of the first substrate to which the light enters, on a side surface of the first insulating film and above a region excluding a region corresponding to the light detecting region of the first insulating film.
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Abstract
According to one embodiment, an optical sensor includes a first substrate, a first insulating film and a light-shielding film. The first substrate has a light detecting region detecting fluorescence generated from a fluorescent material by light with which irradiation is performed from a lateral side. The first insulating film is provided on the first substrate. The light-shielding film is provided, at least, on a side surface of the first substrate to which the light enters, on a side surface of the first insulating film and above a region excluding a region corresponding to the light detecting region of the first insulating film.
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Citations
20 Claims
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1. An optical sensor comprising:
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a first substrate having a light detecting region detecting fluorescence generated from a fluorescent material by light with which irradiation is performed from a lateral side; a first insulating film provided on the first substrate; and a light-shielding film provided, at least, on a side surface of the first substrate to which the light enters, on a side surface of the first insulating film and above a region excluding a region corresponding to the light detecting region of the first insulating film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An optical sensor comprising:
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a first substrate having a first surface and a second surface parallel to the first surface, and having a light detecting region detecting fluorescence generated from a fluorescent material by light irradiated from a lateral side; a first insulating film provided on the second surface of the first substrate; a second substrate supporting the first insulating film; and a light-shielding film provided on a side surface of the first substrate, on a side surface of the first insulating film, on a side surface of the second substrate and on a region excluding a region corresponding to the light detecting region in the first surface of the first substrate, and shielding the light. - View Dependent Claims (11, 12, 13, 14, 15)
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16. An optical sensor comprising:
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a first substrate having a first light detecting region and a second light detecting region which are arranged along an irradiation direction of light and detect fluorescence excited by the light from a fluorescent material; a first insulating film provided on the first detecting region; a second insulating film provided on the second light detecting region; and a light-shielding film provided, at least, on a side surface of the first substrate to which the light enters, on a side surface of the first insulating film and above a region excluding regions corresponding to the first light detecting region of the first insulating film, and shielding the light. - View Dependent Claims (17, 18, 19, 20)
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Specification