Micro-opto-electromechanical systems (MOEMS) device

• US 10,126,321 B2
• Filed: 01/28/2016
• Issued: 11/13/2018
• Est. Priority Date: 01/30/2015
• Status: Active Grant

• Current Assignee: Oscps Motion Sensing Incorporated
• Original Assignee: Kazem Zandi
• Inventors: Zandi, Kazem, Pottier, Pierre
• Primary Examiner(s): Chapman, Jr., John
• Application Number:
  US15/008,559
• Publication Number:
  US 20160223329A1
• Time in Patent Office: 1,020 Days
• Field of Search: 7351426, 7351427
• CPC Class Codes: G01C 19/5755 the devices having a single sensing mass
• CPC Class Codes: G01P 15/093 by photoelectric pick-up
• CPC Class Codes: G01P 15/18 in two or more dimensions

Abstract

A micro-opto-electromechanical systems (MOEMS) device is described. The device comprises at least one anchor on a chip; at least one spring connected to the anchor; at least one proof mass connected to the spring, the at least one proof mass being movable with respect to the chip; a movable optical element connected to the at least one proof mass; a first waveguide connected to the chip, the first waveguide being adapted for receiving light from a light source and a second waveguide connected to the chip, the second waveguide being adapted for operatively coupling to a photodetector and the movable optical element being disposed between the back end of the first waveguide and the front end of the second waveguide.

Claims

1. A micro-opto-electromechanical systems (MOEMS) device, comprising:

at least one anchor on a chip;

at least one spring connected to the at least one anchor;

at least one proof mass connected to the at least one spring, the at least one proof mass being movable with respect to the chip;

a movable optical element connected to the at least one proof mass;

a first waveguide connected to the chip, the first waveguide being adapted for receiving light from a light source through a front end and delivering light through a back end; and

a second waveguide connected to the chip, the second waveguide being adapted for receiving light from the first waveguide through a front end and delivering light through a back end, the second waveguide being adapted for operatively coupling to a photodetector; and

at least one fixed optical element,

the movable optical element and the at least one fixed optical element being disposed between the back end of the first waveguide and the front end of the second waveguide, the movable optical element and the at least one fixed optical element forming at least part of a deformable Bragg mirror.

2. The MOEMS device of claim 1, wherein the movable optical element and the at least one fixed optical element further form at least part of a Fabry-Perot cavity.

3. The MOEMS device of claim 1, wherein the MOEMS device is a gyroscope adapted for measuring rotational rate, the gyroscope further comprising:

at least one side plate connected to the at least one spring; and

a comb drive connected to the chip, the comb drive operatively connected to the at least one proof mass through the at least one side plate, the comb drive providing driving oscillations to the at least one proof mass.

4. The MOEMS device of claim 1, wherein the MOEMS device is an accelerometer adapted for measuring an external acceleration applied to the chip.

5. A micro-opto-electromechanical systems (MOEMS) device, comprising:

at least one anchor on a chip;

at least one spring connected to the at least one anchor;

at least one proof mass connected to the at least one spring, the at least one proof mass being movable with respect to the chip;

a movable optical element connected to the at least one proof mass, the movable optical element being curved;

a first waveguide connected to the chip, the first waveguide being adapted for receiving light from a light source through a front end and delivering light through a back end; and

a second waveguide connected to the chip, the second waveguide being adapted for receiving light from the first waveguide through a front end and delivering light through a back end, the second waveguide being adapted for operatively coupling to a photodetector,

the movable optical element being disposed between the back end of the first waveguide and the front end of the second waveguide.

6. The MOEMS device of claim 5, wherein the first and second waveguides are integral to the chip.

7. The MOEMS device of claim 5, wherein the MOEMS device is an accelerometer adapted for measuring an external acceleration applied to the chip.

8. The MOEMS device of claim 5, wherein the MOEMS device is a gyroscope adapted for measuring rotational rate, the gyroscope further comprising:

at least one side plate connected to the at least one spring; and

a comb drive connected to the chip, the comb drive operatively connected to the at least one proof mass through the at least one side plate, the comb drive providing driving oscillations to the at least one proof mass.

9. A multi-axis MOEMS-based sensing device on a chip, comprising:

a plurality of micro-opto-electromechanical systems (MOEMS) devices, the plurality of MOEMS devices being oriented in a plurality of directions, each device of the plurality of MOEMS devices comprising;

at least one spring connected to the chip;

at least one proof mass connected to the at least one spring, the at least one proof mass being movable with respect to the chip;

a movable optical element connected to the at least one proof mass;

a first waveguide connected to the chip, the first waveguide being adapted for receiving light from a light source through a front end and delivering light through a back end; and

a second waveguide connected to the chip, the second waveguide being adapted for receiving light from the first waveguide through a front end and delivering light through a back end, the second waveguide being adapted for operatively coupling to a photodetector,

the movable optical element being disposed between the back end of the first waveguide and the front end of the second waveguide, and

for at least one device of the plurality of MOEMS devices, the movable optical element being curved.

10. The multi-axis MOEMS-based sensing device of claim 9, wherein at least one MOEMS device of the plurality of MOEMS devices is an accelerometer adapted for measuring an external acceleration applied to the chip.

11. The multi-axis MOEMS-based sensing device of claim 9, wherein at least one MOEMS device of the plurality of MOEMS devices is a gyroscope adapted for measuring rotational rate, the gyroscope further comprising:

at least one side plate connected to the at least one spring; and

a comb drive connected to the chip, the comb drive operatively connected to the at least one proof mass through the at least one side plate, the comb drive providing driving oscillations to the at least one proof mass.

12. The multi-axis MOEMS-based sensing device of claim 9, further comprising at least one other MOEMS device acting as a reference, the one other MOEMS device comprising:

a fixed optical element connected to the chip;

a first waveguide connected to the chip, the first waveguide being adapted for receiving light from a light source through a front end and delivering light through a back end; and

a second waveguide connected to the chip, the second waveguide being adapted for receiving light from the first waveguide through a front end and delivering light through a back end, the second waveguide being adapted for operatively coupling to a photodetector,

the fixed optical element being disposed between the back end of the first waveguide and the front end of the second waveguide.