Capacitive physical quantity sensor

• US 10,126,323 B2
• Filed: 05/20/2014
• Issued: 11/13/2018
• Est. Priority Date: 05/22/2013
• Status: Active Grant

• Current Assignee: DENSO Corporation
• Original Assignee: DENSO Corporation
• Inventors: Sakai, Minekazu, Sugimoto, Kiyomasa
• Primary Examiner(s): Caputo, Lisa
• Assistant Examiner(s): Devito, Alex
• Application Number:
  US14/890,937
• Publication Number:
  US 20160103149A1
• Time in Patent Office: 1,638 Days
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type
• CPC Class Codes: G01P 2015/088 for providing wafer-level encapsulation
• CPC Class Codes: G01P 21/00 Testing or calibrating of apparatus or devices covered by the preceding groups

Abstract

A capacitive physical quantity sensor includes a first substrate, a movable electrode, a fixed electrode, a second substrate, a signal applying unit, a C-V conversion circuit, and an auxiliary electrode. The auxiliary electrode is disposed from a portion of the second substrate which faces the movable electrode to a portion of the second substrate which faces a displaceable region of the movable electrode. The signal applying unit applies a predetermined potential to the auxiliary electrode at the time of self-diagnosis, to thereby increase a density of electric force lines generated between the fixed electrode located in a direction of displacing the movable electrode and the movable electrode.

Claims

1. A capacitive physical quantity sensor comprising:

a first substrate that has a surface;

a movable electrode that is disposed adjacent to the surface of the first substrate, and formed integrally with a beam part which is displaceable in a predetermined direction in a planar direction of the surface of the first substrate by application of a physical quantity;

a fixed electrode that is disposed adjacent to the surface of the first substrate in a state to face the movable electrode;

a second substrate that is joined to the first substrate;

a signal applying unit that applies a diagnostic signal for self-diagnosis which displaces the movable electrode between the movable electrode and the fixed electrode at the time of the self-diagnosis;

a C-V conversion circuit that outputs a voltage corresponding to a change in a capacitance between the movable electrode and the fixed electrode when the diagnostic signal is applied to the movable electrode and the fixed electrode; and

an auxiliary electrode that is disposed from a portion of the second substrate opposite to the movable electrode to a portion of the second substrate opposite to a displaceable region of the movable electrode, wherein

during a normal operation, the capacitive physical quantity sensor outputs a voltage corresponding to the change in the capacitance between the fixed electrode and the movable electrode, and

the signal applying unit applies a predetermined potential to the auxiliary electrode during the self-diagnosis to make a density of electric force lines generated between the fixed electrode located in a direction of displacing the movable electrode and the movable electrode higher than the density of electric force lines generated between the fixed electrode and the movable electrode during the normal operation.

2. The capacitive physical quantity sensor according to claim 1, wherein

a plurality of the movable electrodes and a plurality of the fixed electrodes are alternately arrayed, and

in one of the movable electrodes and two of the fixed electrodes adjacent to each other through the one movable electrode, an interval between one of the fixed electrodes and the movable electrode is set to be smaller than an interval between the other of the fixed electrodes and the movable electrode.

3. The capacitive physical quantity sensor according to claim 2, wherein

the auxiliary electrode includes a first auxiliary electrode that faces the movable electrode when the movable electrode is displaced in one direction in the predetermined direction, and a second auxiliary electrode that faces the movable electrode when the movable electrode is displaced in an opposite direction to the one direction, and

the signal applying unit applies a predetermined potential to the first auxiliary electrode, and applies a potential different from the predetermined potential to the second auxiliary electrode at the time of the self-diagnosis to make a density of electric force lines generated between the fixed electrode located in a direction of displacing the movable electrode and the movable electrode higher than the density of electric force lines generated between the fixed electrode and the movable electrode during the normal operation, and make the density of electric force lines generated between the fixed electrode and the movable electrode, which are located in an opposite direction to the direction of displacing the movable electrode, lower than the density of electric force lines generated between the fixed electrode and the movable electrode during the normal operation.

4. The capacitive physical quantity sensor according to claim 1, wherein

the second substrate is disposed adjacent to another surface of the first substrate opposite to the surface of the first substrate, and supports the first substrate.

5. The capacitive physical quantity sensor according to claim 1, wherein

the first substrate is a substrate in which an insulating film and a semiconductor layer are disposed on the support substrate in order, and

the second substrate is disposed adjacent to the surface of the first substrate, and seals the movable electrode and the fixed electrode.

6. The capacitive physical quantity sensor according to claim 1, wherein

the second substrate is one of two second substrates,

one of the two second substrates is disposed adjacent to the surface of the first substrate, and seals the movable electrode and the fixed electrode, and the other of the two second substrates is disposed adjacent to an opposite side to the surface of the first substrate, and supports the first substrate, and

the auxiliary electrode is disposed on each of the two second substrates.

7. The capacitive physical quantity sensor according to claim 1, wherein

the second substrate has a convex portion projecting toward the first substrate, and

the auxiliary electrode is arranged on a tip end surface of the convex portion in a projecting direction.

8. The capacitive physical quantity sensor according to claim 1, wherein

the first substrate is provided with a movable part including the movable electrode, and first and second fixed parts each having the fixed electrode, and

the first and second fixed parts are disposed at opposite sides of the movable part.