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MEMS devices having tethering structures

  • US 10,131,541 B2
  • Filed: 07/21/2016
  • Issued: 11/20/2018
  • Est. Priority Date: 07/21/2016
  • Status: Active Grant
First Claim
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1. A method for fabricating a micro-electromechanical system (MEMS) device, the method comprising:

  • receiving a carrier wafer;

    bonding a MEMS wafer, which includes a plurality of die, to the carrier wafer;

    forming a cavity separating an upper surface of the carrier wafer from a lower surface of a die of the MEMS wafer;

    forming a separation trench that laterally surrounds an outermost sidewall of the die, wherein formation of the cavity and the separation trench leaves a tethering structure suspending the die over the upper surface of the carrier wafer, wherein the tethering structure includes a plurality of projections, wherein each projection of the plurality of projections includes a plurality of layers that are stacked in parallel over one another over the separation trench; and

    translating the die and carrier wafer with respect to one another to break the tethering structure and separate the die from the carrier wafer.

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