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Angular velocity sensor

  • US 10,132,631 B2
  • Filed: 04/17/2015
  • Issued: 11/20/2018
  • Est. Priority Date: 04/23/2014
  • Status: Active Grant
First Claim
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1. An angular velocity sensor comprising:

  • a first substrate including a first surface and a second surface, the second surface being disposed opposite to the first surface;

    a vibrating member disposed on the first substrate and including a drive piece, wherein the drive piece is capable of vibrating in a plane direction of the first substrate, and the vibrating member detects an angular velocity applied to a plane of the first substrate during a vibration of the drive piece;

    a second substrate disposed on a side of the first surface of the first substrate;

    a first drive piece control electrode disposed on a portion of the drive piece close to the second substrate;

    a first drive piece auxiliary electrode disposed on a portion of the second substrate facing a displaceable region of the first drive piece control electrode disposed on the drive piece, wherein a first auxiliary region of the first drive piece auxiliary electrode is disposed opposing an entire first control region of the displaceable region of the first drive piece control electrode, and wherein a capacitance is generated between the first drive piece auxiliary electrode and the first drive piece control electrode; and

    a first drive piece control circuit applying a voltage to the first drive piece auxiliary electrode,wherein the first drive piece control circuit adjusts, based on the capacitance generated between the first drive piece control electrode and the first drive piece auxiliary electrode, the voltage to be applied to the first drive piece auxiliary electrode so that a distance between the first drive piece control electrode and the first drive piece auxiliary electrode is maintained to be constant over the entire first control region of the displaceable region of the first drive piece control electrode.

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