Capacitive linear encoder

• US 10,132,653 B2
• Filed: 12/03/2015
• Issued: 11/20/2018
• Est. Priority Date: 12/04/2014
• Status: Active Grant

• Current Assignee: Hexagon Technology Center GmbH (Hexagon AB)
• Original Assignee: Hexagon Technology Center GmbH (Hexagon AB)
• Inventors: Rohner, Marcel, Bednarek, Ingo, Wohlgenannt, Rainer, Baumann, Lukas
• Primary Examiner(s): Astacio-Oquendo, Giovanni
• Application Number:
  US14/958,802
• Publication Number:
  US 20160161292A1
• Time in Patent Office: 1,083 Days
• Field of Search: 324679, 324658, 324686, 324661
• CPC Class Codes: G01D 5/2415 adapted for encoders

Abstract

Some embodiments of the invention include a capacitive linear encoder for determining positions comprising a scale and a read head for capacitively scanning the scale, wherein scale and read head are movable relative to one another. The scale has at least one, preferably capacitive, position reference marker. On the basis of the position references provided by the capacitive position reference marker, the positions are locatable in absolute terms and verifiable.

Claims

1. A capacitive linear encoder for determining positions along a feed direction comprising:

a read head having a multiplicity of first coupling electrodes arranged along the feed direction,

a scale having a multiplicity of second coupling electrodes arranged along the feed direction, and

a control and evaluation unit, wherein;

read head and scale are displaceable relative to one another in the feed direction,

the width of the first coupling electrodes and the width of the second coupling electrodes are coordinated with one another,

the first coupling electrodes have at least three coupling signal phases offset with respect to one another, wherein the sequence of the coupling signal phases is defined by a phase permutation, such that in each case a series of adjacent first coupling electrodes form a P-interval,

upon control by the control and evaluation unit temporally changing coupling signals are exchanged by capacitive coupling between the first and second coupling electrodes,

the positions are determinable by the control and evaluation unit by a signal evaluation of the coupling signals exchanged between the first and second coupling electrodes, wherein the second coupling electrodes are divided into at least two mutually reciprocal types for a differential evaluation of the coupling signals, and

the scale

is passive, for which purpose the linear encoder comprises capacitive, signal transfer means for transferring the coupling signals between scale and read head, and

has at least one position reference marker which is formed by means of the signal transfer means, for which purpose signal transfer means are modified at a location of the scale that defines a position reference,

for position reference marker identification the position reference marker is identifiable by means of identification signals controlled by the control and evaluation unit.

2. The linear encoder according to claim 1, wherein:

the signal transfer means comprises a capacitive signal transfer means.

3. The linear encoder according to claim 1, wherein:

the position reference marker comprises a capacitive position reference marker.

4. The linear encoder according to claim 1, wherein:

the second coupling electrodes comprise receiver electrodes.

5. The linear encoder according to claim 4, wherein:

the read head has at least two third coupling electrodes, wherein at least one third coupling electrode is fitted in a manner disposed upstream and/or downstream of each first transfer electrode in the feed direction, and the third coupling electrodes are usable as shielding electrodes for electrically shielding the respective first transfer electrode, wherein the read head has, between the respective first transfer electrode and the respective third coupling electrodes,

further shielding electrodes serving for electrically shielding the first transfer electrodes.

6. The linear encoder according to claim 1, wherein:

the first coupling electrodes comprise emitter electrodes.

7. The linear encoder according to claim 1, wherein:

the first coupling electrodes have four coupling signal phases offset with respect to one another by in each case one quarter.

8. The linear encoder according to claim 1, wherein:

the positions are locatable in absolute terms on the basis of a reference position marker defining an absolute reference point, and/or

the scale has a plurality of position reference markers in the feed direction, wherein positions located in absolute terms on the basis of the reference position markers are verifiable.

9. The linear encoder according to claim 1, wherein:

the signal feedback means are embodied as transfer electrodes, wherein the scale has a plurality of second transfer electrodes per type of the second coupling electrodes, and the read head has at least one first transfer electrode per type of the second coupling electrodes, wherein;

each second transfer electrode is electrically conductively connected to one or a plurality of second coupling electrodes of one type, second transfer electrodes couple capacitively to the at least one first transfer electrode of the same type.

10. The linear encoder according to claim 9, wherein:

a respective position reference marker is formed by means of adjacent modified second transfer electrodes, wherein in each case at least two adjacent second transfer electrodes are short-circuited for the modification, wherein;

the read head has at least one third coupling electrode which

is suitable for transmitting identification signals which change temporally, and

by means of capacitive coupling the identification signals are transmittable between the third coupling electrode and second transfer electrodes,

a respective position reference marker is identifiable on the basis of the identification signals.

11. The linear encoder according to claim 10, wherein:

the at least one third coupling electrode is fitted to the read head in the feed direction upstream and/or downstream of a first transfer electrode and in a manner electrically insulated therefrom, and the third coupling electrode and the second transfer electrodes are coordinated with one another in such a way that the modified second transfer electrodes serve for transmitting the identification signals between the third coupling electrode and the first transfer electrode.

12. The linear encoder according to claim 11, wherein:

the third coupling electrode and the second transfer electrodes are coordinated with one another by virtue of the fact that two or more short-circuited second transfer electrodes have an extent in the feed direction such that with a constant relative position of read head with respect to scale the short-circuited second transfer electrodes are capacitively couplable both to the respective first transfer electrode and to the third coupling electrode, such that a transfer of identification signals transmitted by the third coupling electrode to the control and evaluation unit takes place only in the presence of a capacitive position reference marker in the form of the short-circuited second transfer electrodes.

13. The linear encoder according to claim 12, wherein:

the second transfer electrodes are adjacent in the feed direction.

14. The linear encoder according to claim 12, wherein:

the read head has shielding electrodes for electrically shielding the first transfer electrodes, whereby disturbances of the coupling signals caused by external or internal sources are at least reduced.

15. The linear encoder according to claim 1, wherein:

for robustness relative to deviations from an ideal alignment of the read head with respect to the scale transversely with respect to the feed direction the extent transversely with respect to the feed direction of transfer electrodes coupling to one another of the scale and of the read head differ from one another, and/or

each second transfer electrode is connected to a sequence of second coupling electrodes that are adjacent in the feed direction, wherein the length of each such sequence corresponds to the length over which exactly one of the P-intervals extends on the read head.

16. The linear encoder according to claim 1, wherein:

the first and/or second coupling electrodes are surrounded by an electrically shielding protective electrode, and/or

the first and/or second coupling electrodes are coordinated with one another in such a way that a sinusoidal profile of the capacitive coupling is generated by a displacement of the scale relative to the read head, wherein

for as dense an arrangement as possible, mutually facing edges of directly adjacent first coupling electrodes are shaped such that they are approximately straight, and

directly adjacent first coupling electrodes are aligned in opposite directions.

17. A capacitive linear encoder for determining positions along a feed direction comprising:

a read head having a multiplicity of first coupling electrodes arranged along the feed direction,

a scale having a multiplicity of second coupling electrodes arranged along the feed direction, and

a control and evaluation unit, wherein;

read head and scale are displaceable relative to one another in the feed direction,

the width of the first coupling electrodes and the width of the second coupling electrodes are coordinated with one another,

the first coupling electrodes have at least three coupling signal phases offset with respect to one another, wherein the sequence of the coupling signal phases is defined by a phase permutation, such that in each case a series of adjacent first coupling electrodes form a P-interval,

upon control by the control and evaluation unit temporally changing coupling signals are exchanged by capacitive coupling between the first and second coupling electrodes,

the positions are determinable by the control and evaluation unit by a signal evaluation of the coupling signals exchanged between the first and second coupling electrodes, wherein the second coupling electrodes are divided into at least two mutually reciprocal types for a differential evaluation of the coupling signals,

the scale is passive, for which purpose the linear encoder comprises transfer electrodes as signal transfer means for transmitting the coupling signals from the scale to the read head, wherein

the scale has a plurality of second transfer electrodes per type of the second coupling electrodes, and the read head has at least one first transfer electrode per type of the second coupling electrodes,

each of the second transfer electrodes is electrically conductively connected to one or a plurality of second coupling electrodes of the same type,

second transfer electrodes couple capacitively to the at least one first transfer electrode of the same type,

the read head has shielding electrodes for electrically shielding the first transfer electrodes, whereby disturbances of the coupling signals caused by external or internal sources are at least reduced, wherein the shielding electrodes are fitted in a manner disposed upstream and/or downstream of the first transfer electrodes in the feed direction, wherein in relation to a respective first transfer electrode at least one respective shielding electrode is fitted in a manner disposed upstream in the feed direction and one respective shielding electrode is fitted in a manner disposed downstream in the feed direction, and

the extent in the feed direction of the arrangement of the first coupling electrodes is greater than the extent of the first transfer electrodes, such that a portion of the first coupling electrodes extends beyond the first transfer electrode in the feed direction, wherein the extent in the feed direction of the arrangement of the first coupling electrodes is at least approximately of the same magnitude as the extent in the feed direction of the respective first transfer electrodes and of the respective shielding electrodes together.

18. A method for determining positions for a linear encoder, the method comprising:

displacing the read head relative to the scale along the feed direction proceeding from a first relative position of read head with respect to scale,

capacitively scanning the scale by means of the read head by means of exchanging coupling signals between the first and second coupling electrodes, wherein the exchanging is dependent on the respective relative position,

transmitting the coupling signals by means of the signal transfer means between scale and read head,

determining with a control and evaluation unit a relative position as distance between the first relative position and a second relative position of read head with respect to scale by means of differential signal evaluation of the exchanged coupling signals.

19. The method according to claim 18, wherein:

in the course of displacing, at least one position reference marker is identified by means of the identification signals and, on the basis of the identified position reference marker, the relative position is located in absolute terms and/or a position located in absolute terms is verified.

20. The method according to claim 18, wherein:

the method provides a position determining mode in which

the coupling signals are evaluated for position determining purposes by the control and evaluation unit, and

third coupling electrodes are grounded and serve as shielding electrodes for shielding the first transfer electrodes, and

provides a position reference marker identification mode in which, by means of the at least one third coupling electrode, identification signals for identifying position reference markers are transmitted and the identification signals for identifying the position reference markers are evaluated,

wherein, by means of the time division multiplex method,

the two modes proceed sequentially with respect to one another, and/or

the transmission of coupling signals for different coupling signal phases takes place in a manner temporally offset with respect to one another.