Microwave plasma processing apparatus

• US 10,134,567 B2
• Filed: 02/13/2015
• Issued: 11/20/2018
• Est. Priority Date: 07/02/2010
• Status: Active Grant

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Choi, Jin Hyuk, Han, Sang Chul, Kee, Jong Il, Lee, Young dong, Lee, Guen Suk, Oh, Seung Hun
• Primary Examiner(s): Dhingra, Rakesh K
• Application Number:
  US14/622,236
• Publication Number:
  US 20150162167A1
• Time in Patent Office: 1,376 Days
• Field of Search: 118715-733, 118723 MW, 15634541
• CPC Class Codes: C23C 16/511 using microwave discharges
• CPC Class Codes: H01J 37/3222 Antennas
• CPC Class Codes: H01L 21/67069 for drying etching

Abstract

In accordance with example embodiments, a plasma processing apparatus includes a chamber configured to peform a plasma process, an upper plate on the chamber, an antenna under the upper plate and the antenna is configured to generate plasma in the chamber, an upper insulator between the upper plate and the antenna and the upper insulator covers a top of the antenna, a lower insulator covering a bottom of the antenna, an antenna support ring configured to fix the antenna to the upper plate, and a metal gasket adhered to the antenna support ring.

Claims

1. An antenna for a microwave plasma processing apparatus comprising:

a plate, the plate having,

a plurality of grooves on a circumferential edge of the plate, wherein the grooves are open ended,

a plurality of first slots arranged circumferentially at a first radius of the plate,

a plurality of second slots arranged circumferentially at a second radius of the plate, and

a plurality of third slots arranged circumferentially at a third radius of the plate,

wherein the plurality of the first, second, and third slots include a variety of cross shapes,

the first slots are configured to be in a shape of a cross having a first sub slot, a second sub slot, a third sub slot, and a fourth sub slot, and

the first to fourth sub slots are separated from each other, and

wherein the plurality of grooves correspond to and accommodate a plurality of protrusions on an antenna support ring disposed below the plate.

2. The antenna for a microwave plasma processing apparatus according to claim 1, wherein the first to fourth sub slots are comprised of two pairs of slots, and the two pairs of slots cross.

3. The antenna for a microwave plasma processing apparatus according to claim 2, wherein the two pairs of slots cross substantially orthogonal.

4. The antenna for a microwave plasma processing apparatus according to claim 2, wherein one of the two pairs of slots are in a symmetrical shape.

5. The antenna for a microwave plasma processing apparatus according to claim 1, wherein the antenna includes only the plurality of the first, second and third slots.

6. The antenna for a microwave plasma processing apparatus according to claim 1, wherein the second radius is greater than the first radius, and the third radius is greater than the second radius.

7. The microwave antenna of claim 1, wherein at least one of the second slots and the third slots are configured to be in the shape of a cross, the at least one of the second slots and the third slots including a first leg connected to a second leg.

8. A microwave plasma processing apparatus comprising:

a chamber configured to perform a plasma process;

an upper plate on the chamber;

an antenna under the upper plate, the antenna configured to generate plasma in the chamber;

an upper insulator between the upper plate and the antenna, the upper insulator covering a top of the antenna;

a lower insulator covering a bottom of the antenna; and

an antenna support ring disposed below the antenna and configured to fix the antenna to the upper plate,

wherein the antenna includes at least one groove on a circumferential edge of the antenna, wherein the at least one groove is open-ended, and

a plurality of first slots, second slots, and third slots on a first circumferential surface, a second circumferential surface, and a third circumferential surface of the antenna respectively,

the plurality of the first, second, and third slots include a variety of cross shapes,

the first slots are configured to be in a shape of a cross having a first sub slot, a second sub slot, a third sub slot, and a fourth sub slot, and the first to fourth sub slots are separated from each other, and

wherein the at least one groove corresponds to and accommodates at least one protrusion on the antenna support ring.

9. The microwave plasma processing apparatus according to claim 8, further comprising a metal gasket adhered to the antenna support ring.

10. The microwave plasma processing apparatus according to claim 8, wherein the plurality of the first, second and third slots are configured to be cross-shaped.

11. The microwave plasma processing apparatus according to claim 10, wherein the first to fourth sub slot are orthogonal to adjacent slots.

12. The microwave plasma processing apparatus according to claim 10, wherein the first to fourth sub slot are in four cardinal directions.

13. The microwave plasma processing apparatus according to claim 8, wherein the antenna includes only the plurality of the first, second and third slots.

14. The microwave plasma processing apparatus of claim 8, wherein at least one of the second slots and the third slots are configured to be in the shape of a cross, the at least one of the second slots and the third slots including a first leg connected to a second leg.

15. An antenna for a microwave plasma processing apparatus comprising:

a plate, the plate having,

a plurality of grooves on a circumferential edge of the plate, wherein the grooves are open ended,

a plurality of first slots arranged circumferentially at a first radius of the plate,

a plurality of second slots arranged circumferentially at a second radius of the plate, and

a plurality of third slots arranged circumferentially at a third radius of the plate,

wherein the plurality of the first, second, and third slots include a variety of cross shapes, and

wherein the plurality of grooves correspond to and accommodate a plurality of protrusions on an antenna support ring disposed below the plate.