Imprint resist and substrate pretreatment for reducing fill time in nanoimprint lithography

• US 10,134,588 B2
• Filed: 03/24/2017
• Issued: 11/20/2018
• Est. Priority Date: 03/31/2016
• Status: Active Grant

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Liu, Weijun, Stachowiak, Timothy Brian, DeYoung, James P., Khusnatdinov, Niyaz
• Primary Examiner(s): Nikmanesh, Seahvosh
• Application Number:
  US15/469,224
• Publication Number:
  US 20170287708A1
• Time in Patent Office: 606 Days
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
• CPC Class Codes: H01L 21/0212 the material being fluoro carbon compounds, e.g.(CFx) n, (CHxFy) n or polytetrafluoroethylene
• CPC Class Codes: H01L 21/022 the layer being a laminate, i.e. composed of sublayers, e.g. stacks of alternating high-k metal oxides adhesion layers or buffer layers H01L21/02304, H01L21/02362
• CPC Class Codes: H01L 21/02304 formation of intermediate layers, e.g. buffer layers, layers to improve adhesion, lattice match or diffusion barriers
• CPC Class Codes: H01L 21/0273 characterised by the treatment of photoresist layers

Abstract

Facilitating throughput in nanoimprint lithography processes by using an imprint resist including fluorinated components and a substrate treated with a pretreatment composition to promote spreading of an imprint resist on the substrate. The interfacial surface energy between the pretreatment composition and air exceeds the interfacial surface energy between the imprint resist and air by at least 1 mN/m, and the contact angle of the imprint resist on the surface of the nanoimprint lithography template is less than 15°.

Claims

1. A nanoimprint lithography method comprising:

disposing a pretreatment composition on a substrate to form a pretreatment coating on the substrate, wherein the pretreatment composition comprises a first polymerizable component;

disposing discrete portions of imprint resist on the pretreatment coating, each discrete portion of the imprint resist covering a target area of the substrate, wherein the imprint resist is a polymerizable composition and comprises at least one of a fluorinated surfactant and a fluorinated polymerizable component;

forming a composite polymerizable coating on the substrate as each discrete portion of the imprint resist spreads beyond its target area, wherein the composite polymerizable coating comprises a mixture of the pretreatment composition and the imprint resist;

contacting the composite polymerizable coating with a surface of a nanoimprint lithography template; and

polymerizing the composite polymerizable coating to yield a composite polymeric layer on the substrate,

wherein the interfacial surface energy between the pretreatment composition and air exceeds the interfacial surface energy between the imprint resist and air by at least 1 mN/m, and the contact angle of the imprint resist on the surface of the nanoimprint lithography template is less than 15°

.

2. The nanoimprint lithography method of claim 1, wherein the imprint resist comprises:

0 wt % to 80 wt %, 20 wt % to 80 wt %, or 40 wt % to 80 wt % of one or more monofunctional acrylates and 20 wt % to 98 wt % of one or more difunctional or multifunctional acrylates, including the fluorinated polymerizable component if present;

1 wt % to 10 wt % of one or more photoinitiators; and

1 wt % to 10 wt % of one or more surfactants, including the fluorinated surfactant if present.

3. The nanoimprint lithography method of claim 2, wherein the imprint resist comprises 90 wt % to 98 wt % of the one or more difunctional or multifunctional acrylates and is essentially free of monofunctional acrylates.

4. The nanoimprint lithography method of claim 2, wherein the imprint resist comprises one or more of the monofunctional acrylates and 20 wt % to 75 wt % of the one or more difunctional or multifunctional acrylates.

5. The nanoimprint lithography method of claim 1, wherein the imprint resist comprises a fluorinated polymerizable component and is free of fluorinated surfactant.

6. The nanoimprint lithography method of claim 5, wherein the fluorinated polymerizable component is a fluorinated acrylate.

7. The nanoimprint lithography method of claim 6, wherein the fluorinated acrylate has one of the following structures:

8. The nanoimprint lithography method of claim 7, wherein R is a perfluorinated alkyl group or a perfluorinated aryl group.

9. The nanoimprint lithography method of claim 6, wherein the fluorinated acrylate comprises at least one of:

1H,1H,6H,6H-perfluoro-1,6-hexandiol diacrylate,

1H,1H-perfluoro-n-octyl acrylate,

1H,1H-perfluoro-n-decyl acrylate,

pentafluorophenyl acrylate,

1,1,1,3,3-hexafluoroisopropyl acrylate,

1H,1H,3H-hexafluorobutyl acrylate,

1H,1H,2H,2H-heptadecafluorodecyl acrylate,

1H,1H,5H-octafluoropentyl acrylate,

2,2,3,3,4,4,5,5,6,6,7,7-dodecafluoroheptyl acrylate

3,3,4,4,5,5,6,6,7,7,8,8,9,9,10,10,11,11,12,12-heneicosafluorodedecyl acrylate,

2,2,3,3,4,4,4-heptafluorobutyl acrylate,

2,2,3,3,3-pentafluoropropyl acrylate,

3,3,4,4,5,5,6,6,7,7,8,8,8-tridecafluorooctyl acrylate, and

2,2-bis(trifluoromethyl)-1,3-propanediol diacrylate.

10. The nanoimprint lithography method of claim 1, wherein the imprint resist comprises a fluorinated surfactant and a fluorinated polymerizable component.

11. The nanoimprint lithography method of claim 10, wherein the fluorinated polymerizable component is an acrylate.

12. The nanoimprint lithography method of claim 11, wherein the fluorinated acrylate has one of the following structures:

13. The nanoimprint lithography method of claim 12, wherein R is a perfluorinated alkyl group or a perfluorinated aryl group.

14. The nanoimprint lithography method of claim 11, wherein the fluorinated acrylate comprises at least one of:

1H,1H,6H,6H-perfluoro-1,6-hexandiol diacrylate,

1H,1H-perfluoro-n-octyl acrylate,

1H,1H-perfluoro-n-decyl acrylate,

pentafluorophenyl acrylate,

1,1,1,3,3-hexafluoroisopropyl acrylate,

1H,1H,3H-hexafluorobutyl acrylate,

1H,1H,2H,2H-heptadecafluorodecyl acrylate,

1H,1H,5H-octafluoropentyl acrylate,

2,2,3,3,4,4,5,5,6,6,7,7-dodecafluoroheptyl acrylate

3,3,4,4,5,5,6,6,7,7,8,8,9,9,10,10,11,11,12,12-heneicosafluorodedecyl acrylate,

2,2,3,3,4,4,4-heptafluorobutyl acrylate,

2,2,3,3,3-pentafluoropropyl acrylate,

3,3,4,4,5,5,6,6,7,7,8,8,8-tridecafluorooctyl acrylate, and

2,2-bis(trifluoromethyl)-1,3-propanediol diacrylate.

15. The nanoimprint lithography method of claim 10, wherein the fluorinated surfactant comprises X—

(OCH₂CH₂)_n—

R—

(OCH₂CH₂)_nOH or X—

(OCH₂CH₂)_n—

R—

(OCH₂CH₂)_nO—

X, where R=alkyl, aryl, or poly(propylene glycol);

X=fluorinated alkyl or fluorinated ether; and

n is an integer of 2 to 20, 5 to 15, or 10 to 12.

16. The nanoimprint lithography method of claim 15, wherein R=poly(propylene glycol).

17. The nanoimprint lithography method of claim 15, wherein Y=perfluorinated alkyl.

18. The nanoimprint lithography method of claim 15, wherein n is an integer of 10 to 12.

19. The nanoimprint lithography method of claim 10, wherein the interfacial surface energy between the fluorinated surfactant and air exceeds the interfacial surface energy between the fluorinated polymerizable component and air.

20. The nanoimprint lithography method of claim 1, wherein the imprint resist comprises a fluorinated surfactant and a non-fluorinated surfactant and is free of fluorinated polymerizable components.

21. The nanoimprint lithography method of claim 20, wherein the fluorinated surfactant comprises X—

R—

CH(CH₃)CH₂(OCH(CH₃)CH₂)_nOH, or X—

R—

CH(CH₃)CH₂(OCH(CH₃)CH₂)_nCH(CH₃)CH₂—

R—

X, wherein R=a linking atom or a linking group;

X=a fluorinated alkyl or a fluorinated ether; and

n is an integer of 2 to 50, 5 to 30, or 10 to 25.

22. The nanoimprint lithography method of claim 21, wherein R═

O.

23. The nanoimprint lithography method of claim 21, wherein X=a perfluorinated alkyl.

24. The nanoimprint lithography method of claim 21, wherein n is an integer of 25 to 35.

25. The nanoimprint lithography method of claim 20, wherein the non-fluorinated surfactant comprises X—

R—

(OCH₂CH₂)_nOH, wherein R=alkyl, aryl, or poly(propylene glycol);

X═

H or —

(OCH₂CH₂)_nOH; and

n is an integer of 2 to 20, 5 to 15, or 10 to 12.

26. The nanoimprint lithography method of claim 25, wherein R=poly(propylene glycol).

27. The nanoimprint lithography method of claim 25, wherein X═

—

(OCH₂CH₂)_nOH.

28. The nanoimprint lithography method of claim 25, wherein n is an integer of 10 to 12.

29. The nanoimprint lithography method of claim 20, wherein the interfacial surface energy between the non-fluorinated surfactant and air exceeds the interfacial surface energy between the fluorinated surfactant and air.

30. The nanoimprint lithography method of claim 1, wherein the pretreatment composition comprises at least one of propoxylated (3) trimethylolpropane triacrylate, trimethylolpropane triacrylate, dipentaerythritol pentaacrylate, trimethylolpropane ethoxylate triacrylate, 1,12-dodecanediol diacrylate, poly(ethylene glycol) diacrylate, tetraethylene glycol diacrylate, 1,3-adamantanediol diacrylate, nonanediol diacrylate, m-xylylene diacrylate, and tricyclodecane dimethanol diacrylate.

31. The nanoimprint lithography method of claim 1, wherein the imprint resist comprises 1 wt % to 10 wt % of the fluorinated polymerizable component, 1 wt % to 10 wt % of the fluorinated surfactant, or both.

32. A method for manufacturing a processed substrate, the method comprising the nanoimprint lithography method of claim 1.

33. A method for manufacturing an article, the method comprising the nanoimprint lithography method of claim 1.

34. A nanoimprint lithography method comprising:

disposing a pretreatment composition on a substrate to form a pretreatment coating on the substrate, wherein the pretreatment composition comprises a first polymerizable component;

disposing discrete portions of imprint resist on the pretreatment coating, each discrete portion of the imprint resist covering a target area of the substrate,

wherein the imprint resist is a polymerizable composition and comprises at least one of a fluorinated surfactant and a fluorinated polymerizable component;

forming a composite polymerizable coating on the substrate as each discrete portion of the imprint resist spreads beyond its target area, wherein the composite polymerizable coating comprises a mixture of the pretreatment composition and the imprint resist;

contacting the composite polymerizable coating with a surface of a nanoimprint lithography template; and

polymerizing the composite polymerizable coating to yield a composite polymeric layer on the substrate,

wherein the interfacial surface energy between the pretreatment composition and air exceeds the interfacial surface energy between at least a component of the imprint resist and air by at least 1 mN/m, and the contact angle of the imprint resist on the surface of the nanoimprint lithography template is less than 15°

.