Cantilever piezoelectric transducer
First Claim
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1. A piezoelectric transducer comprising:
- an anchorage;
a cantilever beam of semiconductor material extending from the anchorage in a main direction parallel to a first axis and having a face parallel to a first plane defined by the first axis and by a second axis perpendicular to the first axis;
a piezoelectric layer on the face of the cantilever beam; and
a cross-section of the beam perpendicular to the first axis being asymmetrical and configured to cause the beam to deform out of the first plane in response to forces applied to the anchorage and in response to forces parallel to the second axis.
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Abstract
A piezoelectric transducer includes: an anchorage; a beam of semiconductor material, extending in cantilever fashion from the anchorage in a main direction parallel to a first axis and having a face parallel to a first plane defined by the first axis and by a second axis perpendicular to the first axis; and a piezoelectric layer on the face of the beam. A cross-section of the beam perpendicular to the first axis is asymmetrical and is shaped so that the beam presents deformations out of the first plane in response to forces applied to the anchorage and oriented according to the first axis.
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Citations
20 Claims
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1. A piezoelectric transducer comprising:
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an anchorage; a cantilever beam of semiconductor material extending from the anchorage in a main direction parallel to a first axis and having a face parallel to a first plane defined by the first axis and by a second axis perpendicular to the first axis; a piezoelectric layer on the face of the cantilever beam; and a cross-section of the beam perpendicular to the first axis being asymmetrical and configured to cause the beam to deform out of the first plane in response to forces applied to the anchorage and in response to forces parallel to the second axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A piezoelectric converter, comprising:
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a supporting body of semiconductor material; a mass of semiconductor material, movable with respect to the supporting body; and a plurality of piezoelectric transducers, each of the plurality of piezoelectric transducers including, an anchorage; a beam of semiconductor material, cantilever extending from the anchorage in a main direction parallel to a first axis and having a face parallel to a first plane defined by the first axis and by a second axis perpendicular to the first axis; a piezoelectric layer on the face of the beam; and a cross-section of the beam perpendicular to the first axis being asymmetrical and shaped so that the beam presents deformations out of the first plane in response to forces applied to the anchorage and directed according to the second axis. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
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18. An energy-harvesting system, comprising:
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a piezoelectric converter configured to harvest environmental energy and to convert the environmental energy harvested into an electrical harvesting signal the piezoelectric converter including, a supporting body of semiconductor material; a mass of semiconductor material, movable with respect to the supporting body; a plurality of piezoelectric transducers, each of the plurality of piezoelectric transducers including, an anchorage; a beam of semiconductor material, cantilever extending from the anchorage in a main direction parallel to a first axis and having a face parallel to a first plane defined by the first axis and by a second axis perpendicular to the first axis; a piezoelectric layer on the face of the beam; and a cross-section of the beam perpendicular to the first axis being asymmetrical and shaped to deform the beam out of the first plane in response to forces applied to the anchorage and directed according to the second axis; a storage element configured to store electrical energy deriving from conversion of the environmental energy harvested by the piezoelectric converter; and a harvesting interface coupled to the piezoelectric converter and configured to supply an electrical charging signal to the storage element as a function of the electrical harvesting signal. - View Dependent Claims (19, 20)
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Specification