Cantilever piezoelectric transducer

• US 10,135,365 B2
• Filed: 12/28/2015
• Issued: 11/20/2018
• Est. Priority Date: 06/18/2015
• Status: Active Grant

• Current Assignee: STMicroelectronics SRL (STMicroelectronics NV)
• Original Assignee: STMicroelectronics SRL (STMicroelectronics NV)
• Inventors: Procopio, Francesco, Frangi, Attilio
• Primary Examiner(s): Gordon, Bryan
• Application Number:
  US14/980,762
• Publication Number:
  US 20160373031A1
• Time in Patent Office: 1,058 Days
• Field of Search: 310319, 310339
• CPC Class Codes: H02N 2/181 Circuits; Control arrangements or methods
• CPC Class Codes: H02N 2/186 Vibration harvesters
• CPC Class Codes: H10N 30/306 Cantilevers

Abstract

A piezoelectric transducer includes: an anchorage; a beam of semiconductor material, extending in cantilever fashion from the anchorage in a main direction parallel to a first axis and having a face parallel to a first plane defined by the first axis and by a second axis perpendicular to the first axis; and a piezoelectric layer on the face of the beam. A cross-section of the beam perpendicular to the first axis is asymmetrical and is shaped so that the beam presents deformations out of the first plane in response to forces applied to the anchorage and oriented according to the first axis.

Claims

1. A piezoelectric transducer comprising:

an anchorage;

a cantilever beam of semiconductor material extending from the anchorage in a main direction parallel to a first axis and having a face parallel to a first plane defined by the first axis and by a second axis perpendicular to the first axis;

a piezoelectric layer on the face of the cantilever beam; and

a cross-section of the beam perpendicular to the first axis being asymmetrical and configured to cause the beam to deform out of the first plane in response to forces applied to the anchorage and in response to forces parallel to the second axis.

2. The piezoelectric transducer according to claim 1, wherein the cross-section of the beam perpendicular to the first axis is asymmetrical with respect to centroidal planes.

3. The piezoelectric transducer according to claim 2, wherein the cross-section of the beam perpendicular to the first axis is asymmetrical with respect to a centroidal plane parallel to the first plane and to a centroidal plane parallel to a second plane, which is defined by the first axis and by a third axis perpendicular to the first axis and to the second axis.

4. The piezoelectric transducer according to claim 3, wherein the beam has a first thickness along a first longitudinal edge and a second thickness, smaller than the first thickness, along a second longitudinal edge.

5. The piezoelectric transducer according to claim 4, wherein a first longitudinal portion of the beam extends along the first longitudinal edge and has the first thickness;

and a second longitudinal portion of the beam extends along the second longitudinal edge and has the second thickness.

6. The piezoelectric transducer according to claim 5, wherein the cross-section of the beam perpendicular to the first axis is L-shaped.

7. The piezoelectric transducer according to claim 6, wherein the piezoelectric layer is arranged between a first electrode, which lies on the face of the beam, and a second electrode.

8. The piezoelectric transducer according to claim 7, comprising a weight at one end of the beam.

9. A piezoelectric converter, comprising:

a supporting body of semiconductor material;

a mass of semiconductor material, movable with respect to the supporting body; and

a plurality of piezoelectric transducers, each of the plurality of piezoelectric transducers including,

an anchorage;

a beam of semiconductor material, cantilever extending from the anchorage in a main direction parallel to a first axis and having a face parallel to a first plane defined by the first axis and by a second axis perpendicular to the first axis;

a piezoelectric layer on the face of the beam; and

a cross-section of the beam perpendicular to the first axis being asymmetrical and shaped so that the beam presents deformations out of the first plane in response to forces applied to the anchorage and directed according to the second axis.

10. The piezoelectric converter according to claim 9, wherein the mass is elastically constrained to the supporting body and is movable with respect to the supporting body along the second axis between a first position and a second position.

11. The piezoelectric converter according to claim 10, comprising a bistable device coupled to the mass and configured to enable movement of the mass between the first position and the second position in response selectively to forces that are oriented along the second axis and have an intensity higher than a trigger threshold.

12. The piezoelectric converter according to claim 11, wherein the bistable device has a first stable configuration when the mass is in the first position and a second stable configuration when the mass is in the second position and is connected to the mass so that forces applied to the mass and oriented along the second axis tend to deform the bistable device.

13. The piezoelectric converter according to claim 12, wherein the bistable device comprises a first bistable mechanism, which includes a first elastic lamina element and a second elastic lamina element, which have respective ends fixed to the supporting body, and a bridge element, which connects central portions of the first elastic lamina element and of the second elastic lamina element to the mass.

14. The piezoelectric converter according to claim 13, wherein the first elastic lamina element and the second elastic lamina element are arched and parallel to one another in the first stable configuration and in the second stable configuration and are movable parallel to the first plane between the first stable configuration and the second stable configuration.

15. The piezoelectric converter according to claim 14, wherein the first elastic lamina element and the second elastic lamina element define, in the first stable configuration, respective first concavities open on the side facing the mass and, in the second stable configuration, respective second concavities open on the side opposite to the mass.

16. The piezoelectric converter according to claim 15, wherein the bistable device comprises a second bistable mechanism, substantially the same as the first bistable mechanism, the first bistable mechanism and the second bistable mechanism being coupled to opposite sides of the mass with respect to the second axis.

17. The piezoelectric converter according to claim 16, wherein a first elastic lamina element and a second elastic lamina element of the second bistable mechanism define, in the first stable configuration, respective first concavities open on the side opposite to the mass and, in the second stable configuration, respective second concavities open on the side facing the mass.

18. An energy-harvesting system, comprising:

a piezoelectric converter configured to harvest environmental energy and to convert the environmental energy harvested into an electrical harvesting signal the piezoelectric converter including,

a supporting body of semiconductor material;

a mass of semiconductor material, movable with respect to the supporting body;

a plurality of piezoelectric transducers, each of the plurality of piezoelectric transducers including,

an anchorage;

a beam of semiconductor material, cantilever extending from the anchorage in a main direction parallel to a first axis and having a face parallel to a first plane defined by the first axis and by a second axis perpendicular to the first axis;

a piezoelectric layer on the face of the beam; and

a cross-section of the beam perpendicular to the first axis being asymmetrical and shaped to deform the beam out of the first plane in response to forces applied to the anchorage and directed according to the second axis;

a storage element configured to store electrical energy deriving from conversion of the environmental energy harvested by the piezoelectric converter; and

a harvesting interface coupled to the piezoelectric converter and configured to supply an electrical charging signal to the storage element as a function of the electrical harvesting signal.

19. The energy-harvesting system of claim 18 further comprising a load coupled to the storage element.

20. The energy-harvesting system of claim 19, wherein the load comprises at least one of cellphone circuitry, tablet computer circuitry, laptop computer circuitry, video camera circuitry, digital camera circuitry, and videogame console circuitry.