Cyclic accelerator for accelerating charge carriers and method for manufacturing a cyclic accelerator
First Claim
1. A cyclic accelerator for accelerating electrons, comprising:
- an electron source configured to generate free electrons;
a vacuum chamber configured to receive the free electrons, wherein the vacuum chamber is produced by means of MEMS technology;
electrodes configured to accelerate the free electrons in the vacuum chamber by means of an alternating current field;
a magnetic field generator configured to generate a magnetic field perpendicularly to the direction of movement of the electrons;
wherein an anode which is configured to emit x-rays to the surroundings of the cyclic accelerator by an electron impinging is arranged adjacent to the vacuum chamber,wherein the cyclic accelerator comprises a first semiconductor subcomponent and a second semiconductor subcomponent which are connected to each other in a vacuum-tight manner to form the vacuum chamber therebetween.
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Abstract
What is shown is a cyclic accelerator for accelerating charge carriers. The cyclic accelerator includes a charge carrier source configured to generate free charge carriers, a vacuum chamber configured to receive the free charge carriers, wherein the vacuum chamber is produced by means of MEMS technology, and wherein at least a main surface region of the vacuum chamber has a semiconductor material. In addition, the cyclic accelerator has electrodes configured to accelerate the free charge carriers in the vacuum chamber by means of an alternating current field, and a magnetic field generator configured to generate a magnetic field perpendicularly to the direction of movement of the charge carriers.
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Citations
23 Claims
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1. A cyclic accelerator for accelerating electrons, comprising:
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an electron source configured to generate free electrons; a vacuum chamber configured to receive the free electrons, wherein the vacuum chamber is produced by means of MEMS technology; electrodes configured to accelerate the free electrons in the vacuum chamber by means of an alternating current field; a magnetic field generator configured to generate a magnetic field perpendicularly to the direction of movement of the electrons; wherein an anode which is configured to emit x-rays to the surroundings of the cyclic accelerator by an electron impinging is arranged adjacent to the vacuum chamber, wherein the cyclic accelerator comprises a first semiconductor subcomponent and a second semiconductor subcomponent which are connected to each other in a vacuum-tight manner to form the vacuum chamber therebetween. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A method for manufacturing a cyclic accelerator, comprising:
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providing a substrate which comprises a semiconductor material, for the cyclic accelerator; applying a mask onto the substrate; etching a vacuum chamber into a sub-region of the semiconductor material defined by the mask or a layer of another material arranged above the semiconductor material; producing electrodes at a main surface region of the vacuum chamber; introducing an electron source into the vacuum chamber; sealing and evacuating the vacuum chamber in a vacuum-tight manner; arranging a magnetic field generator such that a magnetic field is generated in the thickness direction of the vacuum chamber; arranging an anode adjacent to the vacuum chamber, wherein the anode is configured to emit x-rays to the surroundings of the cyclic accelerator by an electron impinging. - View Dependent Claims (21, 22, 23)
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Specification