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Apparatus and method for ionic liquid electroplating

  • US 10,138,567 B2
  • Filed: 09/14/2016
  • Issued: 11/27/2018
  • Est. Priority Date: 10/14/2013
  • Status: Active Grant
First Claim
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1. A method for coating at least a first surface of a workpiece with a metallic coating, the method comprising:

  • electrolytically etching a first portion of the workpiece in a container holding an ionic liquid plating solution, the etching step comprising subjecting the workpiece to an anodic potential and subjecting a counter electrode to a cathodic potential to remove at least a portion of an applied displacement layer, thereby (i) accumulating ionic byproducts of the removed portion of the displacement layer in the ionic liquid plating solution in the container and (ii) exposing and activating the first surface;

    electrodepositing the metallic coating onto the exposed and activated portion of the first surface without removing the workpiece from the container or the ionic liquid plating solution, the electrodepositing step comprising subjecting the counter electrode to an anodic potential and subjecting the workpiece to a cathodic potential to deposit coating donor material from the counter electrode onto the surface to be coated; and

    during at least one of the etching step and the electrodepositing step, fluidly communicating a portion of the ionic liquid plating solution through a porous scrubber disposed in the ionic liquid plating solution in the container between the workpiece and the counter electrode, the scrubber having a plurality of metallic outer surfaces in contact with the ionic liquid plating solution to capture at least some of the accumulated ionic byproducts of the removed portion of the displacement layer from the ionic liquid plating solution;

    wherein a portion of the ionic byproducts adhere to the metallic outer surfaces of the scrubber during at least the etching mode, thereby regenerating the ionic liquid plating solution in situ by removing at least a portion of the ionic byproducts therefrom without removing the ionic liquid plating solution from the container.

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