Functional device, electronic apparatus, and moving object

• US 10,139,427 B2
• Filed: 07/14/2014
• Issued: 11/27/2018
• Est. Priority Date: 07/17/2013
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Tanaka, Satoru
• Primary Examiner(s): Lindsay, Jr., Walter L
• Assistant Examiner(s): Fadul, Philip Marcus T
• Application Number:
  US14/330,282
• Publication Number:
  US 20150020591A1
• Time in Patent Office: 1,597 Days
• Field of Search: 7351432
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2203/0109 Bridges
• CPC Class Codes: B81B 3/0021 Transducers for transforming electrical into mechanical energy or vice versa dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00
• CPC Class Codes: B81B 3/0072 For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
• CPC Class Codes: G01C 19/5705 using masses driven in reciprocating rotary motion about an axis
• CPC Class Codes: G01P 1/00 Details of instruments
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Abstract

A functional device includes a movable body and a supporting section configured to support the movable body via coupling sections extending along a first axis. The supporting section includes a connection region connected to the coupling sections and provided along the first axis and contact regions provided on the outer side of the connection region in plan view and electrically connected to a wire provided on a substrate.

Claims

1. A functional device comprising:

a substrate having a surface;

a wire provided on the surface of the substrate;

a movable body supported in a spaced apart relationship relative to the surface of the substrate, the movable body being configured to selectively pivot about a first axis with respect to the surface of the substrate; and

a supporting section configured to pivotally support the movable body relative to the substrate, the supporting section including;

a connector connected to the movable body, the connector extending along the first axis; and

a first support connected to the connector and to the substrate, the first support being disposed alongside the connector and extending along a second axis laterally offset from the first axis, the first support including a first contact electrically connected to the wire, the first contact being electrically connected to the wire along the second axis,

wherein the supporting section is the only physical connection between the movable body and the substrate.

2. The functional device according to claim 1,

wherein the connector is not fixed to the substrate along the first axis.

3. The functional device according to claim 1, wherein

an opening is provided in the movable body, and

the supporting section is arranged in the opening.

4. The functional device according to claim 1,

wherein the supporting section further includes a second support connected to the connector and to the substrate, the second support being disposed alongside the connector and extending along a third axis laterally offset from the first axis, the second support including a second contact electrically connected to the wire, the second contact being electrically connected to the wire along the third axis, and

the first and second contacts being on opposite sides of the first axis in a plan view.

5. The functional device according to claim 1, wherein

the supporting section has:

a first portion extending along a second axis, the second axis crossing the first axis; and

a second portion extending from an end of the first portion, the second portion extending parallel to the first axis,

the connector is provided in the first portion, and

the first contact is provided in the second portion.

6. The functional device according to claim 5, wherein

the first portion of the supporting section spans across the first axis,

the second portion is configured with first and second members, the first and second members project from opposite ends of the first portion parallel to the first axis, and

the first contact is configured with a first contact section and a second contact section, and the first and second contact sections are respectively provided within the first and second members of the second portion.

7. The functional device according to claim 1, wherein the supporting section includes a stress buffering section provided between the connector and the first contact.

8. The functional device according to claim 1, further comprising:

a column upstanding from the surface of the substrate,

wherein at least a part of the first contact of the supporting section is connected to a distal surface of the column.

9. The functional device according to claim 8, wherein

a recess is provided in the distal surface of the column,

the wire is provided on a bottom of the recess, and

the first contact is aligned with the wire in a plan view.

10. The functional device according to claim 1, wherein the movable body includes a stress buffering section provided in the connector along the first axis.

11. An electronic apparatus comprising:

the functional device according to claim 1;

a display; and

a housing that houses the functional device and the display.

12. A moving object comprising:

the functional device according to claim 1;

a moving mechanism; and

a housing that houses the functional device and moving mechanism.

13. A functional device comprising:

a substrate having a surface;

a column upstanding from the surface of the substrate;

a support connected to a distal end of the column;

a connector transversely extending from the support, the connector being spaced apart from the surface of the substrate;

a torsion spring extending from the connector along a first axis, the torsion spring being spaced apart from the surface of the substrate; and

a movable body connected to the torsion spring, the movable body selectively pivoting about the first axis relative to the surface of the substrate via the torsion spring, wherein the support is connected to a distal end of the column along an axis laterally offset from the first axis.