Angle control for radicals and reactive neutral ion beams
First Claim
1. A workpiece processing apparatus, comprising:
- a plasma generator;
a plasma chamber; and
one extraction plate having a first aperture and a second aperture;
wherein charged ions are extracted through the first aperture at a first selected extraction angle, and reactive neutrals are passed through the second aperture at a second selected extraction angle, where the second aperture is different than the first aperture and comprises a suppressor to minimize charged ions passing through the second aperture by repelling or neutralizing the charged ions.
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Abstract
A workpiece processing apparatus allowing independent control of the extraction angles of charged ions and reactive neutrals is disclosed. The apparatus includes an extraction plate having an extraction aperture through which charged ions pass. Plasma sheath modulation and electric fields may be used to determine the extraction angle of the charged ions. The extraction plate also includes one or more neutral species channels, separate from the extraction aperture, through which reactive neutrals are passed at a selected extraction angle. The geometric configuration of the neutral species channels determines the extraction angle of the reactive neutrals. The neutral species channel may also comprise a suppressor, to reduce the number of charged ions that pass through the neutral species channel. The apparatus may be used for various applications, such as directed reactive ion etching.
52 Citations
19 Claims
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1. A workpiece processing apparatus, comprising:
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a plasma generator; a plasma chamber; and one extraction plate having a first aperture and a second aperture; wherein charged ions are extracted through the first aperture at a first selected extraction angle, and reactive neutrals are passed through the second aperture at a second selected extraction angle, where the second aperture is different than the first aperture and comprises a suppressor to minimize charged ions passing through the second aperture by repelling or neutralizing the charged ions. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A workpiece processing apparatus, comprising:
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a plasma generator; a plasma chamber; one extraction plate comprising an extraction aperture; and a blocker disposed within the plasma chamber proximate the extraction aperture; wherein the workpiece processing apparatus uses plasma sheath modulation or electric fields to extract charged ions through the extraction aperture as an ion beam at a first selected extraction angle; wherein reactive neutrals are passed through a neutral species channel at a second selected extraction angle, and wherein passage of charged ions through the neutral species channel is minimized; and wherein the neutral species channel is disposed in the blocker, such that reactive neutrals pass through the neutral species channel in the blocker before exiting the plasma chamber. - View Dependent Claims (9, 10, 11, 12)
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13. A workpiece processing apparatus, comprising:
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a plasma generator; a plasma chamber; one extraction plate comprising an extraction aperture having a width much greater than its height, and neutral species channels disposed on opposite sides of the extraction aperture in a height direction; wherein charged ions exit the plasma chamber through the extraction aperture as an ion beam at a first extraction angle; wherein reactive neutrals are passed through the neutral species channels at a second selected extraction angle; and wherein passage of charged ions through the neutral species channel is minimized. - View Dependent Claims (14, 15, 16, 17, 18, 19)
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Specification