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Angle control for radicals and reactive neutral ion beams

  • US 10,141,161 B2
  • Filed: 09/12/2016
  • Issued: 11/27/2018
  • Est. Priority Date: 09/12/2016
  • Status: Active Grant
First Claim
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1. A workpiece processing apparatus, comprising:

  • a plasma generator;

    a plasma chamber; and

    one extraction plate having a first aperture and a second aperture;

    wherein charged ions are extracted through the first aperture at a first selected extraction angle, and reactive neutrals are passed through the second aperture at a second selected extraction angle, where the second aperture is different than the first aperture and comprises a suppressor to minimize charged ions passing through the second aperture by repelling or neutralizing the charged ions.

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