Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists

• US 10,141,212 B2
• Filed: 06/30/2015
• Issued: 11/27/2018
• Est. Priority Date: 06/19/2002
• Status: Active Grant

• Current Assignee: Murata Machinery Limited (Muratec)
• Original Assignee: Murata Machinery Limited (Muratec)
• Inventors: Doherty, Brian J., Mariano, Thomas R., Sullivan, Robert P.
• Primary Examiner(s): Myers, Glenn F
• Application Number:
  US14/755,928
• Publication Number:
  US 20150303087A1
• Time in Patent Office: 1,246 Days
• CPC Class Codes: B65G 1/0457 with suspended load carriers
• CPC Class Codes: H01L 21/67733 Overhead conveying
• CPC Class Codes: H01L 21/67736 Loading to or unloading from a conveyor
• CPC Class Codes: H01L 21/67769 Storage means

Abstract

A highly efficient Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load and unload Work-In-Process (WIP) parts directly to/from one or more WIP storage units included in the system. The AMHS includes an overhead hoist transport subsystem and at least one vertical carousel stocker having a plurality of storage bins. The overhead hoist transport subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route, which runs adjacent to the carousel stocker, thereby allowing the overhead hoist transport vehicle to access a WIP part directly from one of the storage bins. At least one of the storage bins includes a movable shelf operative to move laterally from a first position along the carousel path to a second position near the overhead hoist transport vehicle. The storage unit is at least partially open to allow the movable shelf to move to the second position, thereby allowing the overhead hoist to access a material unit directly from the movable shelf for subsequent transport along the track between various locations within a product manufacturing facility.

Claims

1. A system, comprising:

an overhead rail in a semiconductor fabrication plant;

an overhead hoist transport (OHT) vehicle configured to move beneath the overhead rail, wherein the OHT vehicle comprises;

a body;

a gripper configured to hold a material unit;

a hoist coupled to the gripper;

a moveable stage coupled to the hoist and the body, wherein the OHT transport vehicle is configured to move the moveable stage along a horizontal axis to positions exterior to the body on either side of the body of OHT transport vehicle;

wherein the movable stage is configured to move along the horizontal axis from a first position within to the body to a second position that is exterior to the body of the OHT vehicle and adjacent to a side of the OHT vehicle; and

wherein the hoist is configured to move the gripper along a vertical axis to a position that is directly below the moveable stage, when the moveable stage is in the first position; and

wherein the hoist is configured to move the gripper along a vertical axis to a position that is directly below the moveable stage, when the moveable stage is in the second position that is exterior to the body of the OHT vehicle and adjacent to a side of the OHT vehicle;

wherein the hoist is configured to move the gripper from the first position vertically to a work station;

wherein the movable stage and the hoist are configured to work in concert to move the gripper to a fixed shelf.

2. The system of claim 1, wherein the moveable stage is configured to move without rotating the gripper and the material unit.

3. The system of claim 1, wherein the moveable stage is further configured to move the gripper along the horizontal axis to a third position on the opposite side of the OHT vehicle.

4. The system of claim 1, wherein the work station comprises a 300 mm load port.

5. The system of claim 1, wherein the material unit comprises a 300 mm front-opening unified pod.

6. The system of claim 1, further comprising:

a storage location;

wherein the hoist is configured to move the gripper from the second position vertically to the storage location.

7. A system comprising:

an overhead rail in a semiconductor fabrication plant;

an overhead hoist transport (OHT) vehicle coupled to the overhead rail, wherein the OHT vehicle comprises;

a body;

a gripper configured to hold a material unit;

a hoist coupled to the movable stage and to the gripper;

a moveable stage coupled to the hoist and the body, wherein the OHT transport vehicle is configured to move the moveable stage along a horizontal axis to positions exterior to the body on either side of the body of OHT transport vehicle;

wherein the movable stage is configured to move along the horizontal axis from a first position within to the body to a second position that is exterior to the body of the OHT vehicle and adjacent to a side of the OHT vehicle; and

wherein the hoist is configured to move the gripper along a vertical axis to a position that is directly below the moveable stage;

wherein the hoist is configured to move the gripper along a vertical axis to a position that is directly below the moveable stage when the moveable stage is in the first position;

wherein the hoist is configured to move the gripper along a vertical axis to a position that is directly below the moveable stage when the moveable stage is in the second position that is adjacent to a side of the OHT vehicle;

wherein the OHT vehicle is configured to move the material unit from a starting position to an ending position, wherein the starting position comprises a horizontal starting position and a vertical starting position, and the ending position comprises a horizontal ending position and a vertical ending position;

wherein the hoist is configured to move the gripper vertically to a work station; and

wherein the movable stage and the hoist are configured to work in concert to move the gripper to a fixed shelf.

8. The system of claim 7, wherein the moveable stage is configured to move without rotating the gripper and the material unit.

9. The system of claim 7, wherein the moveable stage is further configured to move the gripper along the horizontal axis to a third position on the opposite side of the OHT vehicle.

10. The system of claim 7, wherein the moveable stage is configured to move a material unit held by the gripper from the horizontal starting position to the horizontal ending position, and the hoist is configured to move a material unit from the vertical starting position to the vertical ending position.

11. The system of claim 10, wherein the gripper is configured to release the material unit at the ending position.

12. The system of claim 10, wherein the starting position is at the OHT vehicle and the ending position is at a 300 mm process tool load port.

13. The system of claim 12, wherein the gripper is configured to release the material unit at the 300 mm process tool load port.

14. The system of claim 10, wherein the starting position is at a storage location and the second position is at the OHT vehicle.

15. The system of claim 14, wherein the gripper is configured to obtain the material unit from the storage location.

16. The system of claim 10, wherein the ending position is at a conveyer.

17. The system of claim 10, wherein the starting position and the ending position are on opposite sides of the OHT vehicle.

18. The system of claim 10, wherein moving the material unit comprises:

moving the material unit from the starting position to the OHT vehicle;

moving the OHT vehicle to a new location along the track; and

subsequent to the OHT vehicle reaching the new location, moving the material unit to the ending position.