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Semiconductor device

  • US 10,141,453 B2
  • Filed: 12/15/2015
  • Issued: 11/27/2018
  • Est. Priority Date: 12/25/2014
  • Status: Active Grant
First Claim
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1. A semiconductor device comprising:

  • a substrate; and

    a thin film transistor supported on the substrate, the thin film transistor including a gate electrode, an oxide semiconductor layer, a gate insulating layer provided between the gate electrode and the oxide semiconductor layer, and a source electrode and a drain electrode electrically connected to the oxide semiconductor layer,a signal line connected to the source electrode and a scanning line connected to the gate electrode, the scanning line extending along a first direction and the signal line extending along a second direction crossing the first direction,wherein;

    the drain electrode, the source electrode and the oxide semiconductor layer are arranged in line along either the first direction or the second direction;

    the source electrode is shaped so as to project along the second direction, and the drain electrode is arranged so as to oppose the source electrode with the oxide semiconductor layer interposed therebetween;

    the drain electrode is shaped so as to project toward the oxide semiconductor layer;

    a width W1 and a width W2 satisfy a relationship |W1

    W2|≤

    1 μ

    m, where the width W1 is a width of the oxide semiconductor layer in a channel width direction of the thin film transistor, and the width W2 is a width of the drain electrode in a direction perpendicular to a direction in which the drain electrode projects;

    the width W1 and the width W2 are 3 μ

    m or more and 6 μ

    m or less;

    the oxide semiconductor layer and the drain electrode are misaligned from each other in the first direction; and

    a width W3 is 1 μ

    m or more and is less than the width W1, where the width W3 is a width in the first direction of an overlapping portion between the oxide semiconductor layer and the drain electrode.

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