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Method for manufacturing gallium and nitrogen bearing laser devices with improved usage of substrate material

  • US 10,141,714 B2
  • Filed: 08/11/2017
  • Issued: 11/27/2018
  • Est. Priority Date: 02/10/2014
  • Status: Active Grant
First Claim
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1. A plurality of dies, comprising:

  • a gallium and nitrogen containing substrate having a surface region;

    an epitaxial material formed overlying the surface region, the epitaxial material comprising an n-type cladding region, an active region comprising at least one active layer overlying the n-type cladding region, and a p-type cladding region overlying the active region, wherein the epitaxial material is patterned to form the plurality of dies on the surface region, the dies corresponding to a laser device, wherein each of the plurality of dies comprises;

    a release region composed of a material with a smaller bandgap than an adjacent epitaxial material, wherein a lateral width of the release region is narrower than a lateral width of immediately adjacent layers above and below the release region to form undercut regions bounding each side of the release region; and

    a passivation region extending along sidewalls of the active region.

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