Filter and target supply apparatus
First Claim
Patent Images
1. A filter comprising:
- a first member having a first surface provided with a plurality of grooves; and
a second member set with a second surface thereof covering the plurality of grooves,the first member including a first passable portion that allows a fluid to pass between the first surface and a first space, which is defined beside a surface of the first member opposite to the first surface, through a first area of the plurality of grooves,the second member including a second passable portion that allows the fluid to pass between the second surface and a second space, which is defined beside a surface of the second member opposite to the second surface, through a second area of the plurality of grooves distanced from the first area,wherein the first member is made of a material selected from molybdenum, tungsten, aluminum oxide, silicon dioxide glass, silicon carbide, tungsten carbide, aluminum nitride, zirconium boride, and boron carbide, andwherein the second member exposes a part of the plurality of grooves therethrough to the second space.
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Abstract
A filter may include: a first member having a first surface provided with a channel; and a second member set with a second surface thereof covering the channel. The first member may include a first passable portion that allows a fluid to pass between the first surface and a first space, which is defined beside a surface of the first member opposite to the first surface, through a first area of the channel. The second member may include a second passable portion that allows the fluid to pass between the second surface and a second space, which is defined beside a surface of the second member opposite to the second surface, through a second area of the channel distanced from the first area.
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Citations
22 Claims
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1. A filter comprising:
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a first member having a first surface provided with a plurality of grooves; and a second member set with a second surface thereof covering the plurality of grooves, the first member including a first passable portion that allows a fluid to pass between the first surface and a first space, which is defined beside a surface of the first member opposite to the first surface, through a first area of the plurality of grooves, the second member including a second passable portion that allows the fluid to pass between the second surface and a second space, which is defined beside a surface of the second member opposite to the second surface, through a second area of the plurality of grooves distanced from the first area, wherein the first member is made of a material selected from molybdenum, tungsten, aluminum oxide, silicon dioxide glass, silicon carbide, tungsten carbide, aluminum nitride, zirconium boride, and boron carbide, and wherein the second member exposes a part of the plurality of grooves therethrough to the second space. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A filter comprising:
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a first member having a first surface provided with a plurality of grooves; and a second member set with a second surface thereof covering the plurality of grooves, the first member including a first passable portion that allows a fluid to pass between the first surface and a first space, which is defined beside a surface of the first member opposite to the first surface, through a first area of the plurality of grooves, the second member including a second passable portion that allows the fluid to pass between the second surface and a second space, which is defined beside a surface of the second member opposite to the second surface, through a second area of the plurality of grooves distanced from the first area, wherein the first member is made of a material selected from molybdenum, tungsten, aluminum oxide, silicon dioxide glass, silicon carbide, tungsten carbide, aluminum nitride, zirconium boride, and boron carbide, wherein the second member is made of a material selected from molybdenum, tungsten, aluminum oxide, silicon dioxide glass, silicon carbide, tungsten carbide, aluminum nitride, zirconium boride, and boron carbide, and wherein the first member and the second member are diffusion-bonded to each other.
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16. A filter comprising:
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a first member having a first surface provided with a plurality of grooves; and
a second member set with a second surface thereof covering the plurality of grooves, the first member including a first passable portion that allows a fluid to pass between the first surface and a first space, which is defined beside a surface of the first member opposite to the first surface, through a first area of the plurality of grooves,the second member including a second passable portion that allows the fluid to pass between the second surface and a second space, which is defined beside a surface of the second member opposite to the second surface, through a second area of the plurality of grooves distanced from the first area, wherein the second member is made of a material selected from molybdenum, tungsten, aluminum oxide, silicon dioxide glass, silicon carbide, tungsten carbide, aluminum nitride, zirconium boride, and boron carbide, and wherein the second member exposes a part of the plurality of grooves therethrough to the second space. - View Dependent Claims (17, 18, 19, 20, 21, 22)
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Specification