Sensor, electronic device, microphone, blood pressure sensor, and touch panel
First Claim
Patent Images
1. A sensor, comprising:
- a film portion, the film portion being deformable;
a first sensing element fixed to the film portion, the first sensing element including a first magnetic layer, a first opposing magnetic layer, and a first intermediate layer, the first intermediate layer being provided between the first magnetic layer and the first opposing magnetic layer;
a second sensing element fixed to the film portion, the second sensing element including a second magnetic layer, a second opposing magnetic layer, and a second intermediate layer, the second intermediate layer being provided between the second magnetic layer and the second opposing magnetic layer;
a third magnetic layer; and
a fourth magnetic layer,the third magnetic layer havinga first length along a first direction, the first direction being from the film portion toward the first sensing element,a second length along a second direction perpendicular to the first direction,a third length along a third direction perpendicular to the first direction and perpendicular to the second direction,a first composition, anda third magnetization direction,the fourth magnetic layer having at least one ofa fourth length along the first direction, the fourth length being different from the first length,a fifth length along the second direction, the fifth length being different from the second length,a sixth length along the third direction, the sixth length being different from the third length,a second composition different from the first composition, ora fourth magnetization direction different from the third magnetization direction.
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Abstract
According to one embodiment, a sensor includes a deformable film portion, a first sensing element and a second sensing element. The first sensing element is fixed to the film portion, and includes a first magnetic layer of a first material, a first opposing magnetic layer, and a first intermediate layer. The first intermediate layer is provided between the first magnetic layer and the first opposing magnetic layer. The second sensing element is fixed to the film portion, and includes a second magnetic layer of a second material, a second opposing magnetic layer, and a second intermediate layer. The second material is different from the first material. The second intermediate layer is provided between the second magnetic layer and the second opposing magnetic layer.
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Citations
5 Claims
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1. A sensor, comprising:
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a film portion, the film portion being deformable; a first sensing element fixed to the film portion, the first sensing element including a first magnetic layer, a first opposing magnetic layer, and a first intermediate layer, the first intermediate layer being provided between the first magnetic layer and the first opposing magnetic layer; a second sensing element fixed to the film portion, the second sensing element including a second magnetic layer, a second opposing magnetic layer, and a second intermediate layer, the second intermediate layer being provided between the second magnetic layer and the second opposing magnetic layer; a third magnetic layer; and a fourth magnetic layer, the third magnetic layer having a first length along a first direction, the first direction being from the film portion toward the first sensing element, a second length along a second direction perpendicular to the first direction, a third length along a third direction perpendicular to the first direction and perpendicular to the second direction, a first composition, and a third magnetization direction, the fourth magnetic layer having at least one of a fourth length along the first direction, the fourth length being different from the first length, a fifth length along the second direction, the fifth length being different from the second length, a sixth length along the third direction, the sixth length being different from the third length, a second composition different from the first composition, or a fourth magnetization direction different from the third magnetization direction. - View Dependent Claims (2, 3, 4, 5)
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Specification
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Current AssigneeKabushiki Kaisha Toshiba (Toshiba Corporation)
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Original AssigneeKabushiki Kaisha Toshiba (Toshiba Corporation)
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InventorsFuji, Yoshihiko, Hara, Michiko, Masunishi, Kei, Higashi, Yoshihiro, Kaji, Shiori, Yuzawa, Akiko, Hori, Akio, Nagata, Tomohiko, Okamoto, Kazuaki, Otsu, Kenji, Baba, Shotaro
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Primary Examiner(s)HA, NGUYEN Q
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Application NumberUS15/248,412Publication NumberTime in Patent Office830 DaysField of SearchUS Class CurrentCPC Class CodesA61B 2562/0247 Pressure sensorsA61B 2562/12 Manufacturing methods speci...A61B 5/021 Measuring pressure in heart...A61B 5/6898 Portable consumer electroni...G01L 9/0091 Transmitting or indicating ...H04R 1/46 Special adaptations for use...H04R 15/00 Magnetostrictive transducer...H04R 2201/003 Mems transducers or their useH04R 2499/11 Transducers incorporated or...
