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Electrometer

  • US 10,145,879 B2
  • Filed: 12/30/2015
  • Issued: 12/04/2018
  • Est. Priority Date: 12/31/2014
  • Status: Active Grant
First Claim
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1. An electrometer comprising:

  • a sensing module comprising a plurality of electrostatic sensing elements spaced from each other, and a plurality of second electrodes, wherein the plurality of electrostatic sensing elements and the plurality of second electrodes are alternately arranged in a series connection comprising two ends; and

    each of the plurality of electrostatic sensing elements is single walled carbon nanotube or few-walled carbon nanotube; and

    a control module coupled to the two ends, wherein the control module is configured to measure a resistance variation Δ

    R of the series connection and convert the resistance variation Δ

    R into a static electricity potential.

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