Devices, systems and methods including magnetic structures
First Claim
1. A magnetic device, comprising:
- a cap mounted on a semiconductor substrate;
a magnetic structure including a patterned layer of magnetic material, the magnetic structure being disposed on top of a surface of the cap opposite to the semiconductor substrate; and
a circuit electrically coupled to the magnetic structure.
3 Assignments
0 Petitions
Accused Products
Abstract
A magnetic device may include a magnetic structure, a device structure, and an associated circuit. The magnetic structure may include a patterned layer of material having a predetermined magnetic property. The patterned layer may be configured to, e.g., provide a magnetic field, sense a magnetic field, channel or concentrate magnetic flux, shield a component from a magnetic field, or provide magnetically actuated motion, etc. The device structure may be another structure of the device that is physically connected to or arranged relative to the magnetic structure to, e.g., structurally support, enable operation of, or otherwise incorporate the magnetic structure into the magnetic device, etc. The associated circuit may be electrically connected to the magnetic structure to receive, provide, condition or process of signals of the magnetic device.
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Citations
26 Claims
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1. A magnetic device, comprising:
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a cap mounted on a semiconductor substrate; a magnetic structure including a patterned layer of magnetic material, the magnetic structure being disposed on top of a surface of the cap opposite to the semiconductor substrate; and a circuit electrically coupled to the magnetic structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A magnetic device, comprising:
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a semiconductor substrate; a cap mounted on the semiconductor substrate; a micromechanical structure on the semiconductor substrate and under the cap; a magnetic structure disposed vertically relative to the cap, the magnetic structure including a patterned layer of magnetic material; and a circuit electrically coupled to the magnetic structure. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
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18. A magnetic device, comprising:
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a magnetic sensor including patterned magnetoresistive material, the magnetic sensor having an operational sensitivity to magnetic fields in a first direction; a circuit electrically coupled to the magnetic sensor; and a magnetic flux concentrator to channel and/or concentrate magnetic flux of a magnetic field toward the magnetic sensor so as to enable the magnetic sensor to sense a magnetic field in a second direction, the second direction being different than the first direction, the magnetic flux concentrator comprising a patterned layer of magnetic material on a substrate. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26)
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Specification