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Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures

  • US 10,147,577 B2
  • Filed: 05/16/2016
  • Issued: 12/04/2018
  • Est. Priority Date: 06/20/2011
  • Status: Active Grant
First Claim
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1. A hardware description language (HDL) design structure tangibly embodied in a machine-readable data storage medium, said HDL design structure comprising elements that when processed in a computer-aided design system comprising at least a hardware component that generates a machine-executable representation of a MEMS structure, wherein said HDL design structure comprises:

  • a first set of wires on a substrate, comprising fixed actuator electrodes and a contact;

    a second set of wires above the first set of wires; and

    an array of mini-bumps between the first set of wires and the second set of wires, wherein the array of mini-bumps prevent portions of the second set of wires from contacting the fixed actuator electrodes, upon actuation,wherein the array of mini-bumps are in direct contact and extend from insulator material forming an underside of a MEMS beam.

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