Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists

• US 10,147,627 B2
• Filed: 11/14/2013
• Issued: 12/04/2018
• Est. Priority Date: 06/19/2002
• Status: Active Grant

• Current Assignee: Murata Machinery Limited (Muratec)
• Original Assignee: Murata Machinery Limited (Muratec)
• Inventors: Doherty, Brian J., Mariano, Thomas R., Sullivan, Robert P.
• Primary Examiner(s): Myers, Glenn F
• Application Number:
  US14/080,590
• Publication Number:
  US 20140119857A1
• Time in Patent Office: 1,846 Days
• CPC Class Codes: B65G 1/0457 with suspended load carriers
• CPC Class Codes: H01L 21/67733 Overhead conveying
• CPC Class Codes: H01L 21/67736 Loading to or unloading from a conveyor
• CPC Class Codes: H01L 21/67769 Storage means

Abstract

A highly efficient Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load and unload Work-In-Process (WIP) parts directly to/from one or more WIP storage units included in the system. The AMHS includes an overhead hoist transport subsystem and at least one vertical carousel stocker having a plurality of storage bins. The overhead hoist transport subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route, which runs adjacent to the carousel stocker, thereby allowing the overhead hoist transport vehicle to access a WIP part directly from one of the storage bins. At least one of the storage bins includes a movable shelf operative to move laterally from a first position along the carousel path to a second position near the overhead hoist transport vehicle.

Claims

1. A method of operating an overhead hoist transport vehicle, the method comprising:

extending a translating stage to carry an overhead hoist to at least one of a first position proximate to a load port and a second position proximate to a fixed shelf and moving the overhead hoist transport vehicle along a stationary overhead rail;

from the at least one of the first position and the second position;

vertically moving a gripper downward to at least one of a third position above the load port and a fourth position above the fixed shelf; and

loading a material unit on at least one of the load port and the fixed shelf;

wherein the load port is beneath the stationary overhead rail; and

wherein fixed shelf is disposed lateral to the overhead rail;

wherein the translating stage is configured to extend along a horizontal axis and move the overhead hoist to exterior positions on either side of a body of the overhead hoist transport vehicle and to retract the overhead hoist into the body of the overhead hoist transport vehicle;

wherein the translating stage is further configured to pick and place a cassette pod on either side of the body of the overhead transport vehicle.

2. The method of claim 1, wherein the material unit comprises a cassette pod.

3. The method of claim 1, further comprising:

retracting the gripper to a starting position after loading the material unit on the at least one of the load port and the fixed shelf.

4. The method of claim 1, wherein the load port is disposed on an integrated circuit chip manufacturing floor.

5. The method of claim 1, wherein loading the material unit comprises:

placing the material unit on the fixed shelf by releasing the material unit from the gripper.

6. The method of claim 1, wherein loading the material unit comprises:

placing the material unit on the load port by releasing the material unit from the gripper.

7. An overhead hoist transport vehicle comprising:

a body;

an overhead hoist that is configured for movement to at least one of a first position proximate to a load port and a second position proximate to a fixed shelf;

a translating stage coupled to the overhead hoist and the body; and

a gripper that is configured to be vertically moved downward from the at least one of the first position and the second position to at least one of a third position above the load port and a fourth position above the fixed shelf; and

wherein the overhead hoist transport vehicle is configured to load a material unit on at least one of the load port and the fixed shelf;

wherein the overhead hoist transport vehicle is configured to move beneath an overhead rail;

wherein the load port is beneath the stationary overhead rail;

wherein at least a portion of the fixed shelf is disposed lateral to the overhead rail; and

wherein the translating stage is configured to extend along a horizontal axis and move the overhead hoist to exterior positions on either side of a body of the overhead hoist transport vehicle and to retract the overhead hoist into the body of the overhead hoist transport vehicle;

wherein the translating stage is further configured to pick and place a cassette pod on either side of the body of the overhead transport vehicle.

8. The overhead hoist transport vehicle of claim 7, wherein the material unit comprises a cassette pod.

9. The overhead hoist transport vehicle of claim 7, wherein the overhead hoist transport vehicle is configured to perform operations comprising:

retracting the gripper to a starting position after loading the material unit on the at least one of the load port and the fixed shelf.

10. The overhead hoist transport vehicle of claim 7, wherein the load port is disposed on an integrated circuit chip manufacturing floor.

11. The overhead hoist transport vehicle of claim 7, wherein the overhead hoist transport vehicle being configured to place the material unit on the fixed shelf by releasing the material unit from the gripper.

12. The overhead hoist transport vehicle of claim 7, wherein the overhead hoist transport vehicle being configured place the material unit on the load port by releasing the material unit from the gripper.