Micro pick up array pivot mount
First Claim
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1. A pivot mount comprising:
- a pivot platform;
a base;
a plurality of spring arms, each spring arm fixed to the pivot platform at a corresponding inner root, and fixed to the base at a corresponding outer root;
wherein each spring arm includes a switch-back along an axial length of said each spring arm such that a pair of first and second lengths of said each spring arm immediately adjacent the switch-back are parallel to each other.
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Abstract
Systems and methods for aligning a transfer head assembly with a substrate are disclosed. In an embodiment a pivot mount is used for generating a feedback signal in a closed-loop motion control system. In an embodiment, the pivot mount includes a plurality of spring arms, with each spring arm including a switch-back along an axial length of the spring arm such that a pair of first and second lengths of the spring arm are immediately adjacent the switch-back and are parallel to each other. A first strain sensing element is located at the first length, and a second strain sensing element is located at the second length.
131 Citations
15 Claims
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1. A pivot mount comprising:
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a pivot platform; a base; a plurality of spring arms, each spring arm fixed to the pivot platform at a corresponding inner root, and fixed to the base at a corresponding outer root; wherein each spring arm includes a switch-back along an axial length of said each spring arm such that a pair of first and second lengths of said each spring arm immediately adjacent the switch-back are parallel to each other. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification