Method for producing dialkylaminosilane
First Claim
1. A method for producing dialkylaminosilane, by allowing dialkylamine to react with chlorosilane in a mixed solvent of an aprotic polar solvent and a solvent of straight-chain or branched hydrocarbon,wherein the aprotic polar solvent is at least one selected from acetonitrile, dimethylformamide, acetone, dichloromethane, dimethyl sulfoxide, dimethylacetamide and hexamethylphosphoramide.
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Abstract
In a method for synthesizing dialkylaminosilane from a reaction of dialkylamine with chlorosilane as the method for producing dialkylaminosilane, a large amount of dialkylamine hydrochloride is produced as a by-product, in addition to objective dialkylaminosilane. Therefore, upon obtaining objective dialkylaminosilane, reduction of volumetric efficiency caused by a large amount of a solvent is prevented, and dialkylaminosilane is produced at a low cost and in a large amount. Dialkylaminosilane having a small halogen content is produced with high volumetric efficiency by using, as a solvent upon allowing dialkylamine to react with chlorosilane, an aprotic polar solvent having high solubility in dialkylamine hydrochloride and metal chloride each produced as a by-product by the reaction, and straight-chain or branched hydrocarbon having high solubility in dialkylaminosilane and hard to dissolve a halogen compound therein.
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9 Claims
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1. A method for producing dialkylaminosilane, by allowing dialkylamine to react with chlorosilane in a mixed solvent of an aprotic polar solvent and a solvent of straight-chain or branched hydrocarbon,
wherein the aprotic polar solvent is at least one selected from acetonitrile, dimethylformamide, acetone, dichloromethane, dimethyl sulfoxide, dimethylacetamide and hexamethylphosphoramide.
Specification