Method of making a multi-electrode structure usable in molecular sensing devices

• US 10,151,722 B2
• Filed: 10/27/2017
• Issued: 12/11/2018
• Est. Priority Date: 07/26/2016
• Status: Active Grant

• Current Assignee: Roswell Me Incorporated (Soulbrain Holdings Co., Ltd.)
• Original Assignee: Roswell Biotechnologies Inc.
• Inventors: Jin, Sungho, Merriman, Barry L., Geiser, Tim, Choi, Chulmin, Mola, Paul
• Primary Examiner(s): Soderquist, Arlen
• Application Number:
  US15/796,080
• Publication Number:
  US 20180045665A1
• Time in Patent Office: 410 Days
• Field of Search: 422 8201- 8204, 436 86, 436 94, 436149-151, 436512, 436518, 436527, 427 971, 427 984, 427117-118, 427123-1266
• CPC Class Codes: B81B 2201/0214 Biosensors; Chemical sensors
• CPC Class Codes: B81B 2201/058 Microfluidics not provided for in B81B2201/051 - B81B2201/054
• CPC Class Codes: B81B 2203/04 Electrodes
• CPC Class Codes: B81C 1/00126 Static structures not provided for in groups B81C1/00031 - B81C1/00119
• CPC Class Codes: C12Q 1/6869 Methods for sequencing
• CPC Class Codes: C23C 16/01 on temporary substrates, e.g. substrates subsequently removed by etching
• CPC Class Codes: G01N 27/04 by investigating resistance
• CPC Class Codes: G01N 27/221 by investigating the dielectric properties using microwaves G01N22/00; measuring loss factors or dielectric constants per se G01R27/26
• CPC Class Codes: G01N 27/3278 involving nanosized elements, e.g. nanogaps or nanoparticles nanopores G01N33/48721; magnetic beads G01N27/745
• CPC Class Codes: G01N 27/4145 specially adapted for biomolecules, e.g. gate electrode with immobilised receptors

Abstract

A molecular sensor includes a substrate defining a substrate plane, and a plurality of pairs of electrode sheets above or below the substrate at an angle to the substrate plane. The molecular sensor further includes a plurality of inner dielectric sheets between each electrode sheet in each pair of electrode sheets of the plurality of pairs, and an outer dielectric sheet between each pair of electrode sheets of the plurality of pairs.

Claims

1. A method of manufacturing a structure usable in a molecular sensor device, the method comprising:

providing a substrate that defines a substrate plane and further comprises a protrusion protruding from the substrate at an angle to the substrate plane;

depositing a first electrode layer to form a first electrode sheet, wherein at least a portion of the first electrode layer is deposited in an orientation along a side of the protrusion;

depositing an inner dielectric layer on the first electrode sheet to form an inner dielectric sheet;

depositing a second electrode layer on the inner dielectric sheet to form a second electrode sheet;

depositing an outer dielectric layer on the second electrode sheet to form an outer dielectric sheet,

planarizing the first and second electrode sheets, the inner dielectric sheet, and the outer dielectric sheet; and

removing an exposed end portion of the inner dielectric sheet to form a groove located on an exposed end portion of the inner dielectric sheet,

wherein the inner dielectric layer is deposited with a first thickness, and wherein the outer dielectric layer is deposited with a second thickness of at least one order of magnitude greater than the first thickness.

2. The method of claim 1, wherein the steps of depositing the first electrode layer, depositing the inner dielectric layer, depositing the second electrode layer, and depositing the outer dielectric layer are at an oblique angle to the substrate plane, resulting in additional depositing of the layers along a side of the protrusion at the angle to the substrate plane.

3. The method of claim 1, wherein the steps of depositing the first electrode layer, depositing the inner dielectric layer, depositing the second electrode layer, and depositing the outer dielectric layer are repeated at least once to provide at least two pairs of the first and second electrode sheets, wherein each pair is separated by an outer dielectric sheet.

4. The method of claim 1, further comprising, in preparation for the planarizing, attaching a mechanically supportive block material adjacent a stack formed by the deposited first electrode layer, inner dielectric layer, second electrode layer, and outer dielectric layer.

5. The method of claim 1, wherein removing an exposed end portion of the inner dielectric sheet further comprises measuring an electrical, capacitance, or optical measurement between the pair of electrode sheets to indicate when to cease removal.

6. The method of claim 1, further comprising depositing a dielectric cover layer at an angle or perpendicular to the first and second electrode sheets opposite the substrate to define a gap exposing a portion of the pair of electrode sheets.

7. The method of claim 1, further comprising roughening an exposed edge of the first and second electrode sheets.

8. The method of claim 1, further comprising connecting a first and a second lead conductor to the first and second electrode sheets with the first lead conductor connected to the first electrode sheet, and the second lead conductor connected to the second electrode sheet, wherein each lead conductor diverges in width as the lead conductor extends away from an edge of the electrode sheet.

9. The method of claim 1, further comprising depositing a gate electrode parallel to the substrate plane and perpendicular to an electrode plane defined by an electrode sheet in the first and second electrode sheets.

10. The method of claim 1, further comprising forming a channel arranged to introduce a fluid to exposed portions of the first and second electrode sheets.