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Method of making a multi-electrode structure usable in molecular sensing devices

  • US 10,151,722 B2
  • Filed: 10/27/2017
  • Issued: 12/11/2018
  • Est. Priority Date: 07/26/2016
  • Status: Active Grant
First Claim
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1. A method of manufacturing a structure usable in a molecular sensor device, the method comprising:

  • providing a substrate that defines a substrate plane and further comprises a protrusion protruding from the substrate at an angle to the substrate plane;

    depositing a first electrode layer to form a first electrode sheet, wherein at least a portion of the first electrode layer is deposited in an orientation along a side of the protrusion;

    depositing an inner dielectric layer on the first electrode sheet to form an inner dielectric sheet;

    depositing a second electrode layer on the inner dielectric sheet to form a second electrode sheet;

    depositing an outer dielectric layer on the second electrode sheet to form an outer dielectric sheet,planarizing the first and second electrode sheets, the inner dielectric sheet, and the outer dielectric sheet; and

    removing an exposed end portion of the inner dielectric sheet to form a groove located on an exposed end portion of the inner dielectric sheet,wherein the inner dielectric layer is deposited with a first thickness, and wherein the outer dielectric layer is deposited with a second thickness of at least one order of magnitude greater than the first thickness.

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