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Method, apparatus, and system for monitoring manufacturing equipment

  • US 10,152,879 B2
  • Filed: 11/10/2015
  • Issued: 12/11/2018
  • Est. Priority Date: 11/10/2015
  • Status: Active Grant
First Claim
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1. A method for monitoring a manufacturing apparatus, comprising:

  • collecting a control signal, of a controller and a corresponding sensing signal, of the manufacturing apparatus over a predetermined period of time;

    segmenting the control signal and the corresponding sensing signal by categorizing change of the control signal and the corresponding sensing signal in time, to obtain at least one control step;

    calculating a character of the controller based on at least one of the control signal, the sensing signal, the at least one control step, or information from a user manual;

    generating, based on the character, a health index indicating health of the controller; and

    generating a warning signal when the health index exceeds a predetermined threshold.

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